Intelligent Decision System for Purging a Residual Gas inside Tubing in Semiconductor Process

반도체공정의 Tubing 내 잔여가스제거 지적결정시스템

  • 임사환 (한국기술교육대학교 기계공학과) ;
  • 허용정 (한국기술교육대학교 메카트로닉스공학부) ;
  • 최성주 (한국기술교육대학교 기계공학부) ;
  • 이종락 (가스안전교육원 교수실)
  • Published : 2006.12.31


Semiconductor industry has been dramatically developed with the information era of 21C, and the trend now is to consider that the technology of management system of the computer utility that has a high efficiency is important. This study investigated the intelligent decision system for residual gas purge process to effectively remove the residual gas in the tube after replacing the cylinder that is used for the gas cabinet or BSGS(Bulk Specialty Gas Supply System) of the semiconductor process. It was suggest from this study that it is possible to decide the type, frequency and volume of purge gas using various toxic gases which is necessary for each process. Also, this result will be utilized for operating the system, increasing the efficiency of management and saving energy.