- Volume 5 Issue 4 Serial No. 17
기판스테이지 온도에 관한 연구
A Study on Substrate Stage Temperature
- Kim, Sun-Ki (School of Mechanical Engineering, Korea University of Technology and Education) ;
- Lee, Woo-Young (School of Mechanical Engineering, Korea University of Technology and Education) ;
- Kang, Heung-Suk (O.F.T Co., Ltd.)
- 발행 : 2006.12.31
This paper shows that the effect of exposing on the top area and a solution which using a water circulation system. Semiconductor substrate stage is made from Aluminum and is repeated the sequence of exposing (150), turning OFF shutter, taking 30 sec. interval at the top area of stage. So the temperature of substrate temperature rises continuously. On this, we made a waterway at the inner part of the substrate stage and operated a water circulation system. We measured the temperature of a substrate stage surface with a thermocouple attached to the substrate stage. To analyze the top area's temperature, we used Analysis Program ANSYS for analysis and 3D CAD program Solid-Works for modeling.