The Effect of Plasma Treatment on the OLED Characteristics

플라즈마 처리가 유기발광다이오드의 특성에 미치는 영향

  • Shin, Se-Jin (Division of Computer Information, Baekseok college) ;
  • Ahn, Jong-Myung (Division of Computer Information, Baekseok college) ;
  • Kim, Min-Young (Division of Computer Information, Baekseok college) ;
  • Jang, Ji-Geun (Department of Electronics Engineering, Dankook University)
  • 신세진 (백석문화대학교 컴퓨터정보학부) ;
  • 안종명 (백석문화대학교 컴퓨터정보학부) ;
  • 김민영 (백석문화대학교 컴퓨터정보학부) ;
  • 장지근 (단국대학교 전자공학과)
  • Published : 2007.03.31


The effects of plasma treatment on the ITO/glass substrate before deposition of organic materials were investigated in the fabrication of green light emitting organic devices with $Alq_3-C545T$ fluorescent system. In our experiments, the optimum plasma treatment was obtained at the power and time of 150W and 2 minutes under the $Ar(50%)/O_2$ ambient of 1 mTorr. The green OLED with plasma treatment at 150W for 2 minutes showed the luminance and efficiency of $4700\;cd/m^2$ and 8 lm/W at 10V, respectively. On the contrary, the same structured device without plasma treatment showed much lower performance with the luminance of $2600\;cd/m^2$ and the efficiency of 3.6 lm/W at 10 V.