반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

진공 솔더링 공정 중 웨이퍼 온도균일화 제어

Temperature Uniformity Control of Wafer During Vacuum Soldering Process

  • 투고 : 2012.06.01
  • 심사 : 2012.06.15
  • 발행 : 2012.06.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

As decreasing size of chips, the need of wafer level packaging is increased in semi-conductor and display industries. Temperature uniformity is a crucial factor in vacuum soldering process to guarantee quality of bonding between chips and wafer. In this paper, a stepwise iterative algorithm has been suggested to obtain output profile of each heat source. Since this algorithm is based on open-loop stepwise iterative experimental technique, it is easier to implement and cost effective than real time feedback controls. Along with some experiments, it was shown that the suggested algorithm can remarkably improve temperature uniformity of wafer during whole heating process compared with the ordinary manual trial-and error method.

키워드

과제정보

연구 과제 주관 기관 : 한국연구재단

참고문헌

  1. Lee, E. S., Kim, W. B., and Chun, K. J., "A Novel Wafer-Level-packing Scheme Using Solder," J. of The Korean Society of Semiconductor & Display Technology, Vol. 3, pp. 5-9, 2004.
  2. Cho, M., Lee, Y., Joo, S., and Lee, K. S. "Semi- Empirical Model Based Multivariable Iterative Learning Control of an RTP System," IEEE Trans. On Semiconductor Manufacturing, Vol. 18, No. 3, pp.430- 439, 2005. https://doi.org/10.1109/TSM.2005.852111
  3. Won, W., Lee, K. S., and Ji, S. H, "Combained Runto- Run and Delta LQG Control: Controller Design and Application to 12-inch RTP Equipment," Int. Conference on Control, Automation and Systems 2010, pp.469-474, 2010.
  4. Ebert, J. L., Linden, G. W., Roover, D., Porter L. L., Kosut R. L., and Emami-Naeini, A. "Model based Temperature Control of Heaated Plates," 18th IEEE Conference on Advanced Thermal Processing of Semiconductors-RTP 2010, 2010.
  5. Albertos, P., Esparza, A. and Romero, J., "Modelbased Iterative Control Design," Proc. of theAmerican Control Conference, pp. 2578-2582, 2000.
  6. Xiong, Z. and Zhang, J., "Barch-to-Batch Optimal Control of Nonlinear batch Process based on Incrementally Updated Models," IEE Proc. Control Theory Application, Vol. 151, No. 2, pp.158-165, 2004.
  7. Bristow, D. A., Tharayil, M., and Alleyne, A. G., "A Survey of Iterative Learning Control," IEEE Control Systems Magazine, pp.96-114, 2006.
  8. Longman, R.W. "Iterative Learning Control and Repetitive Control for Engineering for Engineering Practice," Int. J. Contr., Vol. 73, No. 10, pp. 930-954, 2000. https://doi.org/10.1080/002071700405905
  9. Mezghani, M., Roux, G., Cabassud, M., Lann, M.V. Le, Dahhou, B., and Casamatta, G. "A Survey of Iterative Learning Control," IEEE Control Systems Magazine, pp.96-114, 2006.
  10. Modest, M. F., Radiation Heat Transfer, 2'nd Edition, USA:Elsevier Science, 2003.