DOI QR코드

DOI QR Code

Verification of Bonding Force between PVP Dielectric Layer and PDMS for Application of Flexible Capacitive-type Touch Sensor with Large Dynamic Range

넓은 다이내믹 레인지의 유연 촉각센서 적용을 위한 PVP 유전층과 PDMS 접착력 검증

  • Won, Dong-Joon (Mechanical Engineering, Pohang University of Science and Technology) ;
  • Huh, Myoung (Mechanical Engineering, Pohang University of Science and Technology) ;
  • Kim, Joonwon (Mechanical Engineering, Pohang University of Science and Technology)
  • Received : 2016.01.03
  • Accepted : 2016.07.21
  • Published : 2016.08.31

Abstract

In this paper, we fabricate arrayed-type flexible capacitive touch sensor using liquid metal (LM) droplets (4 mm spatial resolution). Poly-4-vinylphenol (PVP) layer is used as a dielectric layer on the electrode patterned Polyethylene naphthalate (PEN) film. Bonding tests between hydroxyl group (-OH) on the PVP film and polydimethylsiloxane (PDMS) are conducted in a various $O_2$ plasma treatment conditions. Through the tests, we can confirm that non-$O_2$ plasma treated PVP layer and $O_2$ plasma treated PDMS can make a chemical bond. To measure dynamic range of the device, one-cell experiments are conducted and we confirmed that the fabricated device has a large dynamic range (~60 pF).

Keywords

Acknowledgement

Supported by : National Resarch Foundation of Korea(NRF)

References

  1. E.G. Bakhoum, M.H.M Cheng, "Capacitive pressure sensor with very large dynamic range," IEEE T. COMP. PACK. MAN., vol. 33, no. 1, pp. 79-83, 2010. https://doi.org/10.1109/TCAPT.2009.2022949
  2. H.K. Lee, J. Chung, S.I. Chang, and E. Yoon, "Real-time measurement of the three-axis contact force distribution using a flexible capacitive polymer tactile sensor," J. Micromech. Microeng., vol. 21, no. 3, pp. 035010, February, 2011. https://doi.org/10.1088/0960-1317/21/3/035010
  3. M.Y. Cheng, C.L. Lin, Y.T. Lai, and Y.J. Yang, "A polymer-based capacitive sensing array for normal and shear force measurement," Sensors, vol. 10, pp. 10211-10225, October, 2010. https://doi.org/10.3390/s101110211
  4. J.A. Dobrzynska, M.A.M. Gijs, "Polymer-based flexible capacitive sensor for three-axial force measurements," J. Micromech. Mciroeng., vol. 23, no. 1, pp. 015009, November, 2012.
  5. H.K. Lee, J. Chung, S.I. Chang, and E. Yoon, "Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple Capacitors," J. Microelectromech. S., vol. 17, no. 4, pp. 934-942, August, 2008. https://doi.org/10.1109/JMEMS.2008.921727
  6. L. Viry, A. Levi, M. Totaro, A. Mondini, V. Mattoli, B. Mazzolai et al., "Flexible three-axial force sensor for soft and highly sensitive artificial touch," Adv. Mater., vol. 26, no. 17, pp. 2659-2664, February, 2014. https://doi.org/10.1002/adma.201305064
  7. R.D. Ponce Wong, J.D. Posner, and V.J. Santos, "Flexible microfluidic normal force sensor skin for tactile feedback," Sensor. Actuat. A-Phys, vol. 179, pp. 62-69, June, 2012. https://doi.org/10.1016/j.sna.2012.03.023
  8. M.Y. Cheng, C.L. Lin, and Y.J. Yang, "Tactile and shear stress sensing array using capacitive mechanisms with floating electrodes," in IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Wanchai, Hong Kong, 2010, pp. 228-231.
  9. M.Y. Cheng, X.H. Huang, C.W. Ma, and Y.J. Yang, "A flexible capacitive tactile sensing array with floating electrodes," J. Mciromech. Microeng., vol. 19, pp. 115001, September, 2009. https://doi.org/10.1088/0960-1317/19/11/115001
  10. D.J. Won, S. Baek, H. Kim, and J. Kim, "Arrayed-type touch sensor using micro liquid metal droplets with large dynamic range and high sensitivity," Sensor. Actuat. A-Phys, vol. 235, no. 1, pp. 151-157, November, 2015. https://doi.org/10.1016/j.sna.2015.09.044
  11. K. Fukuda, Y. Takeda, M. Mizukami, D. Kumaki, and S. Tokito, "Fully solution-processed flexible organic thin film transistor arrays with high mobility and exceptional uniformity," Sci. Rep-UK, vol. 4, no. 3947, February, 2014.
  12. A. Folch, B.H. Jo, O. Hurtado, D.J. Beebe, and M. Toner, "Microfabricated elastomeric stencils for micropatterning cell cultures," J. Biomed. Mater. Res., vol. 52, pp. 346-353, March, 2000. https://doi.org/10.1002/1097-4636(200011)52:2<346::AID-JBM14>3.0.CO;2-H
  13. I.J. Baek, J.H. Yoo, H.S. Lim, H.J. Chang, H.H. Park, "Preparation and properties of PVP (poly-4-vinylphenol) gate insulation film for organic thin film transistor," Journal of the microelectronics and packaging society, vol. 12, no. 4, pp. 359-363, 2005.
  14. Y. Sun, J. Rogers, "Structural forms of single crystal semiconductor nanoribbons for high performance stretchable electronics," J. Mater. Chem., vol. 17, pp. 832-840, January, 2007. https://doi.org/10.1039/b614793c