RF Loss Minimization Method Using High Impedance Filter for Research

High Impedance Filter를 이용한 RF Loss 최소화 방법에 대한 연구

  • Wang, Hyun-Chul (School of Electrical, Electronics and Communication Engineering Korea University of Technology and Education) ;
  • Seo, Hwa-Il (School of Electrical, Electronics and Communication Engineering Korea University of Technology and Education)
  • 왕현철 (한국기술교육대학교 전기전자통신공학과) ;
  • 서화일 (한국기술교육대학교 전기전자통신공학과)
  • Received : 2020.03.10
  • Accepted : 2020.03.23
  • Published : 2020.03.31

Abstract

This study designed High impedance filter to reduce RF loss to heater heating wire and increase RF current flowing to heater ground wire. Effects such as D / R improvement and process reproducibility could be seen. In addition, RF parameter distribution optimization was possible by understanding the RF path of PE-CVD equipment using Plasma and designing filter.

Keywords

Acknowledgement

Supported by : 한국기술교육대학교

이 논문은 2020년도 한국기술교육대학교 교수 교육연구진흥과제 지원에 의하여 연구되었음.

References

  1. Seong-Hun Lee, Myung Sik Son, "Design and Fabrication of a BPF for 5.8 GHz Microwave Wireless Power Transmission", J. of the Semiconductor & Display Technology, Vol. 14, No. 4, pp. 88-91, 2015.
  2. Jeong-Ho Choi, Si-Cheol Roh, Jong-Dae Jung, Hwa-Il Seo, "The Silicon Nitride Films according to The Frequency Conditions of Plasma Enhanced Chemical Vapor Deposition" J. of the Semiconductor & Display Technology, Vol. 13, No. 4, pp.21-25, 2014.
  3. Yong-Hyun Ham, Kwang-Ho Kwon, Hyun-Woo Lee, "The Study on the Non-Uniformity of PECVD Sio2 Deposition by the plasma Diagnostics", J. of the Korean institute of electrical and electronic material engineers, Vol. 24, No.2, 2011.
  4. Hyun-Chul Wang, Hwa-il Seo, "High-Impedance Filter for Improving the Efficiency of PE-CVD Equipment" 2018 IEIE Summer conference, Vol. 2018, No.6, pp.154-156, 2018.
  5. Doo-Yong Jung, Chang-Woo Nam, Jong-Ho Lee, Dae- Kyu Choi, Chung-Yuen Won, "CCP and ICP Combination Impedance Matching Device for Uniformity Improvement of Semiconductor Plasma Etching System", J. of the Korean Institute of Power Electronics, Vol. 15, No.4, 2010.
  6. Wan-Shick Hong, "Thin Film Vacuum Process Technology via Chemical Vapor Deposition Methods", Vacuum magazine of Korea Vacuum Society, Vol.1-3, pp. 9-13, 2014. https://doi.org/10.5757/vacmag.1.3.9
  7. Jae-Ryong Lee, Sang_won Yun, "a novel rf active bandpass filter with low noise performance" J. of Korean Institute of Electromagnetic Engineering and Science, Vol.13, No.8, pp.748-753. 2002.
  8. Jae-Hong Shim, Jae-Dong Kim, "Development of a Battery Monitoring Technology using Its Impedance", J. of the Semiconductor & Display Technology, Vol. 10, No. 4, pp.25-29, 2011.