A Study on the Development and Application of Thermal Evaporation Source

Thermal Evaporation 증발원 개발 및 응용에 관한 연구

  • Kim, Kwan-Do (Dept. of Convergence Software, PyeongTaek University)
  • 김관도 (평택대학교 융합소프트웨어학과)
  • Received : 2020.08.06
  • Accepted : 2020.08.27
  • Published : 2020.09.30

Abstract

The thermal evaporation source is used to prepare thin films by physical vapor deposition. Materials of metals, organic materials, were tested and explained for thermal evaporation experiments. The developed effusion cell performance depends on the type of deposition material, the size of the crucible, the performance of the reflector, etc. and the proper conditions were found by producing, comparing and analyzing several sets of effusion cell to quantitatively evaluate the performance of the cell. The effusion cell for thermal evaporation source is used to prepare thin films of Ag, Cu, Mg.

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