• 한국재료학회지
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• 제26권9호
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• pp.486-492
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• 2016

Tungsten (W) thin film was deposited at $400^{\circ}C$ using pulsed chemical vapor deposition (pulsed CVD); film was then evaluated as a nucleation layer for W-plug deposition at the contact, with an ultrahigh aspect ratio of about 14~15 (top opening diameter: 240~250 nm, bottom diameter: 98~100 nm) for dynamic random access memory. The deposition stage of pulsed CVD has four steps resulting in one deposition cycle: (1) Reaction of $WF_6$ with $SiH_4$. (2) Inert gas purge. (3) $SiH_4$ exposure without $WF_6$ supply. (4) Inert gas purge while conventional CVD consists of the continuous reaction of $WF_6$ and $SiH_4$. The pulsed CVD-W film showed better conformality at contacts compared to that of conventional CVD-W nucleation layer. It was found that resistivities of films deposited by pulsed CVD were closely related with the phases formed and with the microstructure, as characterized by the grain size. A lower contact resistance was obtained by using pulsed CVD-W film as a nucleation layer compared to that of the conventional CVD-W nucleation layer, even though the former has a higher resistivity (${\sim}100{\mu}{\Omega}-cm$) than that of the latter (${\sim}25{\mu}{\Omega}-cm$). The plan-view scanning electron microscopy images after focused ion beam milling showed that the lower contact resistance of the pulsed CVD-W based W-plug fill scheme was mainly due to its better plug filling capability.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 추계학술대회 논문집
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• pp.383-383
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• 2009

Silicon is commercially prepared by the reaction of high-purity silica with wood, charcoal, and coal, in an electric arc furnace using carbon electrodes, so called the metallurgical refining process, which produces ~98% pure Si (MG-Si). This can be further purified to solar grade silicon (SoG-Si) by various techniques. The most problematic impurity elements are B and P because of their high segregation coefficients. In this study, we explored the possibility of the using Cat-CVD for Si purification. The existing hot-wire CVD was modified to accommodate the catalyzer and the heating source. Mo boat (1.5 cm ${\times}$ 1 cm ${\times}$ 0.2 cm) was used as a heating source. Commercially available Si was purchased from Nilaco corporation (~99% pure). This powder was kept in the Mo-boat and heated to the purification temperature. In addition to the purification by cat-CVD technique, other methods such as thermal CVD, plasma enhanced CVD, vacuum annealing was also tried. It is found that the impurities are reduced to a great extent when treated with cat-CVD method.

• 공업화학
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• 제29권6호
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• pp.734-739
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• 2018

PVA를 PEDOT : PSS에 첨가해줌으로써 CVD 그래핀 상에 효과적으로 코팅할 수 있었다. PVA의 검화도 및 분자량에 따른 코팅성 및 필름의 전기적 특성을 검토한 결과, DS는 89%, 분자량은 $100,000gmol^{-1}$ 이하인 것이 바람직하였다. 또한, PVA의 첨가량은 PEDOT : PSS의 고형분 대비 5%가 최적으로 나타났다. 이와 같은 PVA를 사용하여 PEDOT : PSS를 CVD 그래핀 위에 코팅한 필름은 CVD 그래핀 필름에 비해서 표면조도, 부착성, 굴곡 내구성 및 고온($160^{\circ}C$)에서의 저항 안정성 등이 현저하게 개선되는 것으로 나타났다.

• 대한간호학회지
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• 제45권1호
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• pp.25-34
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• 2015

Purpose: This study was conducted to examine effects of a cardiocerebrovascular disease (CVD) prevention education program on knowledge, self-efficacy and health behavior among postmenopausal middle-aged women. Methods: A non-equivalent control group pretest-posttest design was used. Participants were 53 postmenopausal middle-aged women who registered in two community culture centers in G metropolitan city. Experimental group (n=26) received a CVD prevention education program 8 times over 8 weeks. Knowledge, self-efficacy and health behavior of the participants were examined with self-report structured questionaries. Data were collected between October 15 and December 11, 2013, and were analyzed using chi-square test, Fisher's exact test, independent t-test, and analysis of covariance with SPSS/PC version 21.0. Results: After the intervention the experimental group showed significant increases in the knowledge of CVD symptoms (p<.001) and CVD risk factors (p<.001), level of self-efficacy (p=.028) and health behavior (p<.001) compared to the control group. However, no significant difference was found between groups for knowledge of CVD prevention (p<.133). Conclusion: Results suggest that a CVD prevention education program can be an effective strategy to improve knowledge on CVD symptoms and risk factors, self-efficacy and health behavior for postmenopausal middle-aged women.

• 대한간호학회지
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• 제42권3호
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• pp.322-332
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• 2012

Purpose: This study was conducted to examine effects of a small group-based cardiocerebrovascular disease (CVD) prevention education program on knowledge, stage of change and health behavior among male bus drivers with CVD risk factors. Methods: A non-equivalent control group pretest-posttest design was used. Participants were 68 male bus drivers recruited from two urban bus companies. Participants from the two groups were selected by matching age, education and risk factors. Experimental group (n=34) received a small group-based CVD prevention education program 8 times over 6 weeks and 3 times through telephone interviews at 2-week intervals. Data were collected between December, 2010 and March, 2011, and were analyzed using chi-square test, t-test, and repeated measure analysis of variance with SPSS/Win18.0. Results: Experimental group showed significantly higher scores in CVD prevention knowledge (p<.001) and health behavior (p<.001) at 6 and 12 weeks after intervention. Participants in pre-contemplation and contemplation stages made progress to contemplation and action. This was significantly better at 6 and 12 weeks after intervention (p<.001). Conclusion: Results suggest that small group-based education programs for CVD prevention are effective in increasing knowledge, stage of change, and health behavior to prevent CVD among male bus drivers with CVD risk.

• 한국직업건강간호학회지
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• 제26권2호
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• pp.74-84
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• 2017

Purpose: This study aimed to assess the risk of developing cardiovascular disease (CVD) and to evaluate the effects of intervention for CVD prevention in construction workers. Methods: A total of 497 workers participated the health status survey and finally 90 workers were analyzed for evaluation of the intervention with the one-group pretest-posttest design. The data were collected from the questionnaires and health examinations in the healthcare service for road constructor's CVD prevention as secondary analysis. The intervention of the healthcare was composed of CVD prevention education for all workers and face to face counselling for the high risk group of CVD risk during 6 months in workplace. Data were analyzed with descriptive statistics, $x^2$ test, Wilcoxon signed rank test, and paired t-test. Results: The moderate and high risk groups of CVD were 9.7% and 0.8%. After the intervention, the physical activity (MET-min/week) significantly increased (Z=-5.46, p<.001). But, there were no significant differences in blood pressure, fasting glucose, body mass index, and CVD risk appraisals between pre and post intervention. Conclusion: The findings imply that it is necessary to develop the health promotion program for construction workers which fully reflects the characteristics of individuals and the organization.

• 한국진공학회지
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• 제14권3호
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• pp.110-114
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• 2005

본 연구는 화학증착(Chemical Vapor Deposition, CVD) 시스템에서 전구체 소모량을 모니터링 하기 위한 방법이다. 전구체는 가격이 매우 비싸기 때문에 이를 모니터링 하기 위한 효과적인 방법이 요구된다. 하나의 예로서 용기내 수위진단을 할 수 있는 초음파 센서를 들 수 있는데 이는 비접촉식이고 가격이 저렴한 유리한 점이있다 본 연구에서는, CVD 시스템에서의 전구체 소모량 모니터링을 위한 초음파 진단기술 개발에 관해 연구한다. 또한 반도체 생산라인에 적용이 가능한 실제 진단장치를 개발, 적용한다.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2014년도 전력전자학술대회 논문집
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• pp.95-96
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• 2014

450mm 반도체 CVD 장비 개발 및 300mm F-CVD (Flowable CVD) 공정 개발에 있어서 공정 마진 확보 및 막질 품질 개선을 위해 주파수 가변형 RF Generator가 필수적으로 요구되고 있다. 20nm이하 STI (Shallow Trench Isolation), PMD (Pre-metal Dielectric) & IMD (Inter-Metal Dielectric) 미세공정 gap fill에 많은 문제점이 도출되고 있으며, 이유로는 Generator 고정 주파수에서 Matching Time delay 또는 Shooting에 의한 산포의 한계로 파악되었으며, 주파수 가변에 의한 고속 Tune 기능이 요구되어진다. 따라서 400kHz 주파수 가변형 RF-Generator 개발을 진행하였으며 본 논문을 통해 개발되어진 장비의 성능과 시험 평가한 결과를 소개하고자 한다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.593-597
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• 2005

FIB equipment can perform sputtering and chemical vapor deposition simultaneously. It is very advantageously used to fabricate a micro structure part having 3D shape because the minimum beam size of ${\phi}$ 10nm and smaller is available. Currently FIB is not being applied in the fabrication of this micro part because of some problems to redeposition and charging effect of the substrate causing reduction of accuracy with regards to shape and productivity. Furthermore, the prediction of the material removal rate information should be required but it has been insufficient for micro part fabrication. The paper have the targets that are FIB-CVD characteristic analysis and minimum line pattern resolution achievement fur 3D micro fabrication. We make conclusions with the analysis of the results of the experiment according to beam current, pattern size and scanning parameters. CVD of 8 pico ampere shows superior CVD yield but CVD of 1318 pico ampere shows the pattern sputtered. And dwell time is dominant parameter relating to CVD yield.

• 한국진공학회지
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• 제4권S1호
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• pp.21-27
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• 1995

AI planarization 공정을 위한 barrier로서 CVD 및 PVD 방법에 의해 증착된 TiN 박막의 특성에 대하여 연구하였다. CVD TiN은 TDMAT source를 사용한 MOCVD방법으로 증착하였으며, PVD TiN은 1:1 aspect ratio(A/R)를 갖는 collimator를 사용한 reactive wputtering법으로 증착하였다. AES, SEM을 이용하여 CVD TiN과 PVD TiN의 조성을 분석하고 barrier 특성을 평가하였다. CVD TiN, PVD TiN 모두 400$\AA$의 두께와 RTA 처리에 의해서 AI planarization에 대한 양호한 barrier 특성을 확보할 수 있었다.