• Title/Summary/Keyword: Non-contact Transportation

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Numerical Study on the Air-Cushion Unit for Transportation of Large-Sized Glass Plate

  • Jun, Hyun-Joo;Kim, Kwang-Sun;Im, Ik-Tae
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.1
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    • pp.59-64
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    • 2007
  • Non-contact transportation of a large-sized glass plate using air cushion for the vertical sputtering system of liquid crystal display (LCD) panel was considered. The objective of the study was to design an air pad unit which was composed of multiple injection and exhaust holes and mass flow supplying pipe. The gas was injected through multiple small holes to maintain the force for levitating glass plate. After hitting the plate, the air was vented through exhaust holes. Complex flow field and resulting pressure distribution on the glass surface were numerically studied to design the air injection pad. The exhaust hole size was varied to obtain evenly distributed pressure distribution at fixed diameter of the injection hole. Considering the force for levitating glass plate, the diameter of the exhaust hole of 30 to 40 times of the gas injection hole was recommended.

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Numerical Study on the Air-Cushion Glass Transportation Unit for LCD Panels

  • Im Ik-Tae;Jeon Hyun-Joo;Kim Kwang-Sun
    • Journal of the Semiconductor & Display Technology
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    • v.5 no.1
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    • pp.27-31
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    • 2006
  • Non-contact transportation system using air cushion for the manufacturing of large-sized LCD panels was considered. Flow characteristics between air pad and glass plate was analyzed using computational fluid dynamics method to obtain optimized air pad configurations. Effects of the design variables such as hole arrays from which gas is injected, gas-feeding method into the gas supplying channels, and horizontal and vertical pitches of clusters of holes were studied. Optimized air pad unit gave evenly distributed pressure contour on the glass surface and well-suspended levitation height in the experiment.

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Vibration Characteristics Analysis of the Disk-Type Stator in Ultrasonic Levitation System (초음파 부상장치의 디스크형 스테이터의 진동 특성 해석)

  • Jeong, Sang-Hwa;Choi, Suk-Bong;Cha, Kyoung-Rae;Kim, Hyun-Uk;Kim, Kwang-Ho;Park, Jun-Ho
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • pp.264-268
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    • 2005
  • In the semiconductor and optical industry the non-contact transportation is required for reducing the damages. The ultrasonic levitation is the solution of the problem. In this paper, the ultrasonic levitation system and 3 disk-type stator for levitating various object are proposed. The vibration modes of disks are analyzed with FEM and designed with the analysis results. The 3D vibration profiles of the disks are measured by Laser scanning vibrometer for verifying the vibration characteristics of the system and the amplitudes of the disks and the levitation heights of object are measured for evaluating the performance.

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Vibration Characteristics Analysis of Ultrasonic Levitation System according to the Disk-Type Stator (디스크형 스테이터 형상에 따른 초음파 부상장치의 진동특성 해석)

  • Jeong S.H.;Choi S.B.;Cha K.R.;Kim H.U.;Kim G.H.;Park J.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • pp.1527-1530
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    • 2005
  • In the semiconductor and optical industry the non-contact transportation is required for reducing the damages. The ultrasonic levitation is the solution of the problem. In this paper, the ultrasonic levitation system and 3 disk-type stator for levitation various object are proposed. The vibration modes of disks are analyzed with FEM and designed with the analysis results. The 3D vibration profiles of the disks are measured by Laser scanning vibrometer for verifying the vibration characteristics of the system. The amplitudes of the disks and the levitation heights of object are measured for evaluating the performance.

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A Study on the Vibration Characteristics in Ultrasonic Levitation System according to the Circular Plate (원형 플레이트 형태에 따른 초음파 부상 장치의 진동특성에 관한 연구)

  • Jeong SangHwa;Choi SukBong;Cha KyoungRae;Kim HyunUk;Kim GwangHo;Park JuneHo
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • pp.364-369
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    • 2005
  • In the semiconductor and optical industry the non-contact transportation is required for reducing the damages. The ultrasonic levitation is the solution of the problem. In this paper, the ultrasonic levitation system and 3 disk-type stator for levitation various object are proposed. The vibration modes of disks are analyzed with FEM and designed with the analysis results. The 3D vibration profiles of the disks are measured by Laser scanning vibrometer for verifying the vibration characteristics of the system. The amplitudes of the disks and the levitation heights of object are measured for evaluating the performance.

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A Study on the Air Cushion Pad of Non-contact Glass Transportation Unit (비접촉식 유리 평판 이송 장치 공기 패드 형상에 대한 연구)

  • Jeon, Hyeon-Ju;Kim, Gwang-Seon;Im, Ik-Tae
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • pp.138-144
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    • 2006
  • Non-contact transportation of a large-sized glass plate using air cushion for the sputtering system of liquid crystal display panel was considered. The gas is injected through multiple small holes to maintain the force for levitating glass plate. Complex flow field and resulting pressure distribution on the glass surface was numerically studied to design the air injection pad. The exhaust hole size was varied to obtain evenly distributed pressure distribution at fixed diameter of the injection hole. Considering the force for levitating glass plate, the diameter of the exhaust hole of 30 to 40 times of the gas injection hole was recommended.

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LCD 제조용 스퍼터링 장비의 비접촉식 유리평판 이송장치에 대한 수치적 연구

  • Gang, U-Jin;Im, Ik-Tae;Kim, U-Seung
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • pp.149-156
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    • 2007
  • Non-contact transportation of the large-sized glass plate using air-cushion is considered for sputtering system of LCD panel. The Argon gas from second gas injection holes is injected to levitate and transport the glass plate. Low maximum pressure and uniform pressure distribution on the bottom surface of the glass plate must be maintained for stable levitation and transportation of the glass plate. Therefore, the analysis of fluid flow between the glass plate and the air-pad is numerically performed for varying space between the injection holes in this study. The pressure uniformity on the bottom surface of the glass plate is evaluated for overall glass plate. The distance between the injection holes must be designed below 90 mm for obtaining the low maximum pressure and uniform pressure distribution.

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Non-Contact Pick-up System for Turning Large Flexible Thin Sheets (대형 유연박판 회전이송용 비접촉 파지시스템 설계)

  • Kim, Joon Hyun;Ahn, Sung Wook;Lee, Se Jin
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.23 no.5
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    • pp.435-442
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    • 2014
  • This paper describes an improved design model that can be used to configure a non-contact pneumatic device to turn a large sheet at the in-line system. For rotational moving in the conveyor system, the conventional method is to turn the system itself. The improved non-contact pick-up system mainly uses 8 pairs of L-shaped latches and 12 swirl type heads. It is positioned above the upward air flow table. This system performs the non-contact gripping and side-edge contact support in the vertical and rotational directions to hold the self-weight of a large flat sheet. A non-contact air head can exert a sufficient gripping ability at 4N lower than the standard working pressure. The side latches support 60% of the lifting force required. Through structural and flow analysis, the working conditions were simultaneously considered in accordance with the deflection and flatness of the glass.

Design of Non-Contact Pick-Up Head for Carrying Large Flat Sheets (대평판 이송을 위한 비접촉 헤드 설계)

  • Kim, Joon Hyun;Kim, Young Geul;Ahn, Sung Wook;Kim, Young Sung
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.22 no.6
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    • pp.937-944
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    • 2013
  • This paper describes an improved model that can be used for configuring a non-contact pneumatic head to handle a large sheet of glass. The cylindrical head model is of a large size (70 mm). It operates on vortex flow, which can simultaneously generate suction and repulsion over the flat object's surface. The head allows for the minimal non-contact lifting of objects weighing over 3N by using reference conditions (working pressure and head dimensions). Additionally, a functional flow-guide is applied for inducing a developing tangential vortex flow to increase suction and repulsion to the reference head. The cylindrical flow-guide is associated with relatively low tangential velocity. The improved model generates greater lifting force than the reference model, as verified experimentally.