• Title/Summary/Keyword: Pressure sensor

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Implementation of an Integrated Pressure-sensor System Adapted to the Optimum Sensitivity

  • Hong, Sung-Hee;Cho, Chun-Hyung
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.17 no.2
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    • pp.186-191
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    • 2017
  • An integrated pressure-sensor system was developed using the sensor-conditioning processes, which resulted in the optimum sensitivity of the pressure-sensor through the signal amplification, noise reduction, and level shift. Due to the specified characteristics among the components, such as operation range, the sensor output was generally limited compared to the full scale of the reading when coupled with other parts. Devices fabricated exhibited comparable characteristics with higher pressure sensitivity to that of the pressure sensor without sensor-conditioning process. In this work, the sensor resolution was at least enhanced at least by 25% using the sensor-conditioning processes.

The Electric Control Method on the Packaging Technology for Non-Conductive Materials Using the Surface Processing Cavity Pressure Sensor (표면 가공형 캐비티 압력센서를 이용하여 비전도성 물질용 패키지 기술에 전기적 제어방식 연구)

  • Lee, Sun-Jong;Woo, Jong-Chang
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.33 no.5
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    • pp.350-354
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    • 2020
  • In this study, a pressure sensor for each displacement was fabricated based on the silicon-based pressure sensor obtained through simulation results. Wires were bonded to the pressure sensor, and a piezoresistive pressure sensor was inserted into the printed circuit board (PCB) base by directly connecting a micro-electro-mechanical system (MEMS) sensor and a readout integrated circuit (ROIC) for signal processing. In addition, to prevent exposure, a non-conductive liquid silicone was injected into the sensor and the entire ROIC using a pipette. The packaging proceeded to block from the outside. Performing such packaging, comparing simple contact with strong contact, and confirming that the measured pulse wavelength appears accurately.

Diaphragm-Type Pressure Sensor with Cu-Ni Thin Film Strain Gauges-II : Design Fabrication and Characteristics of a Pressure Sensor (Cu-Ni 박막 스트레인 게이지를 이용한 다이어프램식 압력 센서-II:압력 센서의 설계 제작의 특성)

  • 민남기;전재형;박찬원
    • Electrical & Electronic Materials
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    • v.10 no.10
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    • pp.1022-1028
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    • 1997
  • In this paper we present the construction details and output characteristics of a diaphragm-type pressure sensor with Cu-Ni(53:47) thin-film strain gauges. In order to improve the sensitivity and the temperature compensation two circumferential gauges are placed near the center of the diaphragm and two radial gauges are located near the edge. For all the gauges the relative change in resistance ΔR/R with pressure is of the order 10$^{-3}$ for the maximum pressure. The output is found to be linear over the entire pressure range(0-30kfg/cm$^2$)and the output sensitivity obtained is 1.6mV/V. The maximum nonlinearity observed in output characteristics is 0.35%FS for 5V excitation and the hysteresis is less than 0.1%FS.

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Development of the high-temperature, high-pressure Dynamic pressure sensor with LGT (LGT를 이용한 고온, 고압용 동압 센서 개발)

  • Kwon, Hyuk Jae;Lee, Kyung Il;Kim, Dong Su;Kim, Young Deog;Lee, Young Tae
    • Journal of the Semiconductor & Display Technology
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    • v.11 no.2
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    • pp.17-21
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    • 2012
  • This study developed a high-temperature, high-pressure dynamic pressure sensor using LGT(lanthanum gallium tantalate). The sensitivity of the fabricated dynamic pressure sensor was 2.1 mV/kPa and its nonlinearity was 2.5%FS. We confirmed that the high-temperature dynamic pressure sensor operated stably in high-temperature environment at $500^{\circ}C$. The developed dynamic pressure sensor using LGT is expected to be applicable not only to gas turbines but also in various industrial areas in duding airplanes and power stations.

Characteristics silicon pressure sensor using dry etching technology (건식식각 기술 이용한 실리콘 압력센서의 특성)

  • Woo, Dong-Kyun;Lee, Kyung-Il;Kim, Heung-Rak;Suh, Ho-Cheol;Lee, Young-Tae
    • Journal of Sensor Science and Technology
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    • v.19 no.2
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    • pp.137-141
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    • 2010
  • In this paper, we fabricated silicon piezoresistive pressure sensor with dry etching technology which used Deep-RIE and etching delay technology which used SOI(silicon-on-insulator) wafer. We improved pressure sensor offset and its temperature dependence by removing oxidation layer of SOI wafer which was used for dry etching delay layer. Sensitivity of the fabricated pressure sensor was about 0.56 mV/V${\cdot}$kPa at 10 kPa full-scale, and nonlinearity of the fabricated pressure sensor was less than 2 %F.S. The zero off-set change rate was less than 0.6 %F.S.

Development of Pressure Sensor using Piezo Resistance Strain gages (압저항형 스트레인 게이지를 이용한 압력센서의 개발)

  • Lee, Dong-Hoon;Kang, Min-Sung;Huh, Yong;Koo, Jae-Mean;Seok, Chang-Sung
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.72-77
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    • 2007
  • A pressure sensor is a sensing device to perceive inputing pressure and convert pressure with an electric signal. Currently, a domestic pressure sensor mostly uses mechanical methods. So, it uses many parts and its cost is high. Therefore, It is necessary to improve the weak points of an existing pressure sensor and develop the accurate and reliable pressure sensor using piezo resistance strain gages.

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Development of Digital Vacuum Pressure Sensor Using MEMS Analog Pirani Gauge

  • Cho, Young Seek
    • Journal of information and communication convergence engineering
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    • v.15 no.4
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    • pp.232-236
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    • 2017
  • A digital vacuum pressure sensor is designed, fabricated, and characterized using a packaged MEMS analog Pirani gauge. The packaged MEMS analog Pirani gauge requires a current source to heat up a heater in the Pirani gauge. To investigate the feasibility of digitization for the analog Pirani gauge, its implementation is performed with a zero-temperature coefficient current source and microcontroller that are commercially available. The measurement results using the digital vacuum pressure sensor showed that its operating range is 0.05-760 Torr, which is the same as the measurement results of the packaged MEMS analog pressure sensor. The results confirm that it is feasible to integrate the analog Pirani gauge with a commercially available current source and microcontroller. The successful hybrid integration of the analog Pirani gauge and digital circuits is an encouraging result for monolithic integration with a precision current source and ADCs in the state of CMOS dies.

Development of Pressure Sensor for Identifying Guinea Pig's Large Intestinal Motility Caused by Drug (약물 투여에 따른 기니피그 대장 운동 측정을 위한 압력센서 개발)

  • Park, Jae-Soon;Park, Jung-Ho;Kim, Eung-Bo;Cho, Sung-Hwan;Jang, Su-Jeong;Joung, Yeun-Ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.1
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    • pp.23-29
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    • 2016
  • In this paper, in order to quantify the peristalsis occurrence in a guinea pig's large intestine, a miniaturized air-gap capacitive pressure sensor was fabricated through micro-electro-mechanical system (MEMS). The proposed pressure sensor is a two-layered biocompatible polyimide substrate consisting of an air-gap capacitive plates between the substrates. The proposed pressure sensor was designed with a careful consideration of the structure and motility mechanism of the guinea pig's large intestine. Artificial pellets were mounted on a prototype pressure sensor to provide some redundancies in the form of size and shape of the guinea pig feces. Capacitance of a prototype sensor was recorded to be 2.5 ~ 3 pF. This capacitance value was later converted to count value using a lab fabricated data conversion system. Sensitivity of the pressure sensor was recorded to be below 1 mmHg per atmospheric pressure. During in vivo testing, artificial peristalsis caused by drug injection was measured by inserting the prototype pressure sensor into the guinea pig's large intestine and pressure data obtained due to artificial peristalsis was graphed using a labview program. The proposed pressure sensor could measure the pressure changes in the proximal, medial, and distal parts of the large intestine. The results of the experiment confirmed that pressure changes of guinea pig's large intestine was proportional to the degree of drug injection.

Respiration Measurement System using Textile Capacitive Pressure Sensor (전기용량성 섬유 압력센서를 이용한 호흡측정 시스템)

  • Min, Se-Dong;Yun, Young-Hyun;Lee, Chung-Keun;Shin, Hang-Sik;Cho, Ha-Kyung;Hwang, Seon-Cheol;Lee, Myoung-Ho
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.59 no.1
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    • pp.58-63
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    • 2010
  • In this paper, we proposed a wearable respiration measurement system with textile capacitive pressure sensor. Belt typed textile capacitive pressure sensor approach of respiration measurement, from which respiration signatures and rates can be derived in real-time for long-term monitoring, are presented. Belt typed textile capacitive pressure sensor has been developed for this measurement system. the distance change of two plates by the pressure of motion has been used for the respiration measurement in chest area. Respiration rates measured with the textile capacitive pressure sensor was compared with standard techniques on 8 human subjects. Accurate measurement of respiration rate with developed sensor system is shown. The data from the method comparison study is used to confirm theoretical estimates of change in capacitance by the distance change. The current version of respiratory rate detection system using textile capacitive pressure sensor can successfully measure respiration rate. It showed upper limit agreement of $3.7997{\times}10^{-7}$ RPM, and lower limit of agreement of $-3.8428{\times}10^{-7}$ RPM in Bland-Altman plot. From all subject, high correlation were shown(p<0.0001). The proposed measurement method could be used to monitor unconscious persons, avoiding the need to apply electrodes to the directly skin or other sensors in the correct position and to wire the subject to the monitor. Monitoring respiration using textile capacitive pressure sensor offers a promising possibility of convenient measurement of respiration rates. Especially, this technology offers a potentially inexpensive implementation that could extend applications to consumer home-healthcare and mobile-healthcare products. Further advances in the sensor design, system design and signal processing can increase the range and quality of the rate-finding, broadening the potential application areas of this technology.

Fiber optic pressure sensor (광섬유 압력센서)

  • 이기완;배준형
    • 제어로봇시스템학회:학술대회논문집
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    • 1996.10b
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    • pp.640-643
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    • 1996
  • In this paper, a sensitivity of the fiber optic pressure sensor in water is demonstrated. A single mode optical fiber Mach-Zehnder interferometer used to detect the change in optical path length produced by the change of fiber optic strain in water. The sensitivity with this system measured 100.mu.psia through an experiment in the static response.

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