• Title/Summary/Keyword: Spin Coater

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Fault Detection System Development for a Spin Coater Through Vibration Assessment (스핀코터의 진동 평가를 통한 이상 검출 시스템 개발)

  • Moon, Jun-Hee;Lee, Bong-Gu
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.11
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    • pp.47-54
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    • 2009
  • Spin coaters are the essential instruments in micro-fabrication processes, which apply uniform thin films to flat substrates. In this research, a spin coater diagnosis system is developed to detect the abnormal operation of TFT-LCD process in real time. To facilitate the real-time data acquisition and analysis, the circular-buffered continuous data transfer and the short-time Fourier transform are applied to the fault diagnosis system. To determine whether the system condition is normal or not, a steady-state detection algorithm and a frequency spectrum comparison algorithm using confidence interval are newly devised. Since abnormal condition of a spin coater is rarely encountered, algorithm is tested on a CD-ROM drive and the developed program is verified by a function generator. Actual threshold values for the fault detection are tuned in a spin coater in process.

A Study on the Effect of the Vibration and Particle Generation of a Spin Coater on Thin Film Coating (회전박막제조기의 진동 및 입자발생이 박막제조에 미치는 영향에 관한 연구)

  • 허진욱;권태종;정진태;한창수;안강호
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.11 no.4
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    • pp.31-36
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    • 2001
  • A spin coater is a machine to coat wafer or LCD display with thin film. Vibration in the spin coater may be one of main troubles in the coating process. In this paper, we focus on the difference between two spin coaters. Vibration sources are identified by experimental approach and are compared to find the difference between the two spin coaters. Also, the particle concentration is observed by laser particle counter (LPC) for the two spin coaters, when the spin coaxers are working. It is also considered whether the defect rate is proportional to the particle concentration. The result shows that particle generation in the coating process is related to excessive vibration of the spin coater shaft and the particles influence the defect rate of the thin film product.

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A Three-Dimensional CFD Study on the Air Flow Characteristics in a Wax Spin Coater for Silicon Wafer Manufacturing (실리콘 웨이퍼 생산공정용 왁스 스핀코팅장치 내 기류 특성에 대한 3차원 전산유동해석)

  • Kim, Yong-Ki;Kim, Dong-Joo;Umarov, Alisher;Kim, Kyoung-Jin;Park, Jun-Young
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.10 no.6
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    • pp.146-151
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    • 2011
  • Wax spin coating is a part of several wafer handling processes in the silicon wafer polishing station. It is important to ensure the wax layer free of contamination to achieve the high degree of planarization on wafers after wafer polishing. Three-dimensional air flow characteristics in a wax spin coater are numerically investigated using computational fluid dynamics techniques. When the bottom of the wax spin coater is closed, there exists a significant recirculation zone over the rotating ceramic block. This recirculation zone can be the source of wax layer contamination at any rotational speed and should be avoided to maintain high wafer polishing quality. Thus, four air suction ducts are installed at the bottom of the wax spin coater in order to control the air flow pattern over the ceramic block. Present computational results show that the air suction from the bottom is quite an effective method to remove or minimize the recirculation zone over the ceramic block and the wax coating layer.

CFD Analysis on the Internal Air Flow Control in a Wax Spin Coater of Silicon Wafer Polishing Station (실리콘 웨이퍼 연마장비용 왁스 스핀코팅장치의 내부기류 제어에 관한 전산유동해석)

  • Kim, Kyoung-Jin;Kim, Dong-Joo;Park, Joong-Youn
    • Journal of the Semiconductor & Display Technology
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    • v.10 no.1
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    • pp.1-6
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    • 2011
  • In this paper, the air flow induced by the rotating flat disk is numerically investigated in a hope to better understand the air flow structures inside the wax spin coater for a silicon wafer polishing station. Due to the complex inner geometry of actual spin coater such as the casing around the rotating ceramic block and servo motor, recirculation of air flow is inevitably found on the coating target if the internal space of spin coater is closed at the bottom and it could be the possible source of contamination on the wax coating. By numerical flow simulation, we found that it is necessary to install the air vent at the bottom and to apply the sufficient air suction in order to control the path of air flow and to eliminate the air recirculation zone above the spinning surface of coating target.

3-Dimensional Modeling and Sensitivity Analysis for Vibration Reduction of the Spin-Coater System (스핀 코터 시스템의 진동 저감을 위한 3차원 모델링과 민감도 해석)

  • 채호철;류인철;한창수
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.2
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    • pp.209-217
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    • 2003
  • In this paper, the dynamic system modeling and the state sensitivity analysis of the spin-coater system are proposed for the reduction of the vibration. In the respect of modeling, the spin-coater system is considered to be composed of servomotor, spindle, supporting base and so on. Each component of model is combined and derived to 3 dimensional equations. The combined model is verified by experimental values of actual system in the frequency domain. By direct differentiation of the constraint equations with respect to kinematic design variables, such as eccentricity of spindle, moment of inertia, rotational stiffness and damping of supported base, sensitivity equations are derived to the verified state equations. Sensitivity of design variables could be used for vibration reduction and natural frequency shift in the frequency domain. Finally, dominant design variables are selected from the sensitivity analysis.

Mechanical Stability Evaluation of Thin Film with Spin-coater (스핀코터를 이용한 박막의 기계적 안정성 평가)

  • Kim, Ji Eun;Kim, Jung Hwan;Hong, Seongchul;Cho, HanKu;Ahn, Jinho
    • Journal of the Semiconductor & Display Technology
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    • v.15 no.1
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    • pp.6-11
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    • 2016
  • For high volume manufacturing using extreme ultraviolet (EUV) lithography, mask protection from contamination during lithography process must be solved, and EUV pellicle is the strongest solution. Based on the technical requirements of EUV pellicle, EUV pellicle should have large membrane area ($110{\times}140mm^2$) with film transmittance over 90% and mechanical stability. Even though pellicle that satisfies size standard with high transmittance has been reported, its mechanical stability has not been confirmed, nor is there a standard to evaluate the mechanical stability. In this study, we suggest a rather simple method evaluating mechanical stability of pellicle membrane using spin-coater which can emulate the linear accelerated motion. The test conditions were designed by simulating the acceleration distribution inside pellicle membrane through correlating the linear acceleration and centripetal acceleration, which occurs during linear movement and rotation movement, respectively. By these simulation results, we confirmed the possibility of using spin-coater to evaluate the mechanical stability of EUV pellicle.

Dynamic Characteristic Evaluation of Spin Coater Module for GaAs Wafer Bonding (화합물 반도체 본딩용 Spin Coater Module의 동특성 평가)

  • Song Jun Yeob;Kim Ok Koo;Kang Jae Hoon
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.6
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    • pp.144-151
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    • 2005
  • Spin coater is regarded as a major module rotating at high speed to be used build up polymer resin thin film layer fur bonding process of GaAs wafer. This module is consisted of spin unit for spreading uniformly, align device, resin spreading nozzle and et. al. Specially, spin unit which is a component of module can cause to vibrate and finally affect to the uniformity of polymer resin film layer. For the stability prediction of rotation velocity and uniformity of polymer resin film layer, it is very important to understand the dynamic characteristics of assembled spin coater module and the dynamic response mode resulted from rotation behavior of spin chuck. In this paper, stress concentration mode and the deformed shape of spin chuck generated due to angular acceleration process are presented using analytical method for evaluation of structural safety according to the revolution speed variation of spin unit. And also, deformation form of GaAs wafer due to dynamic behavior of spin chuck is presented fur the comparison of former simulated results.

The Research via Linear of Tantalum Thin Film Thickness Depending on Revolution Velocity of Spin Coater (스핀코터 회전속도에 따른 탄탈륨 박막두께의 선형모델에 관한 연구)

  • Kim, Seung Wook
    • Journal of the Semiconductor & Display Technology
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    • v.19 no.1
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    • pp.17-22
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    • 2020
  • Recently, the decrease in thin film thickness has been actively studied by changing several physical elements such as the increase in revolution velocity of lower substrate equipped with AC or DC motor. In this paper, we propose a novel spin coater control system that changes AC or DC motor and common use software with limitation of velocity and position control into step motor and LABVIEW software based on GUI to control revolution velocity and position more precisely. By determining six input values of rotation velocity 1, 5, 10, 25, 50, 100 PPS, we fabricated six samples using coating target, TA(tantalum) on silicon substrate and measured their thin film thickness by SEM. Hence, this research can be applied to inferring thin film thickness of tantalum regarding any value of revolution velocity without additional experiments and for linear reference model via property analysis of thin film thickness using other thin-film materials.

Modelling and Sensitivity Analysis for the Performance Improvement of a Spin Coater (스핀 코너 성능향상을 위한 모델링 및 민감도 해석)

  • 권태종;채호철;한창수;정진태;안강호
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.9 no.6
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    • pp.96-102
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    • 2000
  • Spinning mechanism is generally used in coasting process on grass plates. Rebounding PR(Photo Resist) which leads to occur inferiority of coating process is caused by vibrational energy of whole coating system. In this study, the sensitivity analysis is performed to analyze and reduce vibrational terms in the spin coating system. The sensitivity analysis is bared on the numerical expression of this system. By the bond graph method. power flow of each system is represented by some basic bond graph elements. Any energy domain system is modeled using the unified elements. The modelled spin coater system is verified with power spectrum data measured by FFT analyzer. As the results of verifying model parameters and sensitivity analysis, principal factors causing vibration phenomenon are mentioned. A study on vibration method in the spin coating system is discussed.

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3 Dimensional Modeling and Sensitivity Analysis for Vibration Reduction of the Spin-Coater System

  • Park, Jin-Bae;Han, Chang-Soo
    • 제어로봇시스템학회:학술대회논문집
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    • pp.170.2-170
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    • 2001
  • In this paper, the dynamic system modeling and the state sensitivity analysis of the spin-coater system for the reduction of the vibration are proposed. In the respect of modeling, the spin-coater system is composed of components of servomotor, belt, spindle, and a supported base. Each component is defined and combined modeling is derived to 3dimensional equations. Verification of modeling is verified by experimental values of actual system in the frequency domain. By direct differentiation the constraint equations with respect to kinematic design variables, such as eccentricity of spindle, moment of inertia, torsional stiffness and damping of supported base, sensitivity equations are derived to the verified state equations. Sensitivity of design variables could be used for vibration reduction and natural frequency shift in the frequency domain. Finally, dominant design variables ...

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