• Title/Summary/Keyword: Wafer Center Alignment

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A Wafer Pre-Alignment System Using One Image of a Whole Wafer (하나의 웨이퍼 전체 영상을 이용한 웨이퍼 Pre-Alignment 시스템)

  • Koo, Ja-Myoung;Cho, Tai-Hoon
    • Journal of the Semiconductor & Display Technology
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    • v.9 no.3
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    • pp.47-51
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    • 2010
  • This paper presents a wafer pre-alignment system which is improved using the image of the entire wafer area. In the previous method, image acquisition for wafer takes about 80% of total pre-alignment time. The proposed system uses only one image of entire wafer area via a high-resolution CMOS camera, and so image acquisition accounts for nearly 1% of total process time. The larger FOV(field of view) to use the image of the entire wafer area worsen camera lens distortion. A camera calibration using high order polynomials is used for accurate lens distortion correction. And template matching is used to find a correct notch's position. The performance of the proposed system was demonstrated by experiments of wafer center alignment and notch alignment.