• Title/Summary/Keyword: aspect ratio

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High-Aspect-Ratio Nanoscale Patterning in a Negative Tone Photoresist

  • Ryoo, Kwangki;Lee, Jeong Bong
    • Journal of information and communication convergence engineering
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    • v.13 no.1
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    • pp.56-61
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    • 2015
  • The demand for high-aspect-ratio structures has been increasing in the field of semiconductors and other applications. Here, we present the commercially available negative-tone SU-8 as a potential resist that can be used for direct patterning of high-aspect-ratio structures at the submicron scale and the nanoscale. Such resist patterns can be used as polymeric molds to create high-aspect-ratio metallic submicron and nanoscale structures by using electroplating. Compared with poly (methyl methacrylate) (PMMA), we found that the negative tone resist required an exposure dose that was less than that of PMMA of equal thickness by a factor of 100-150. Patterning of up to 4:1 aspect ratio SU-8 structures with a minimum feature size of 500 nm was demonstrated. In addition, nanoimprint lithography was studied to further extend the aspect ratio to realize a minimum feature size of less than 10 nm with an extremely high aspect ratio in the negative resist.

A Proton Beam Shaping using an Extreme Aspect Ratio Micro-hole (극대세장비 마이크로 홀을 이용한 양성자 빔 집적 응용)

  • Kim, Jin-Nam;Kwon, Won-Tae;Lee, Seong-Gyu
    • Journal of the Korean Society for Precision Engineering
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    • v.29 no.7
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    • pp.737-744
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    • 2012
  • EDM is the manufacturing process that uses the thermal energy to machine electrically conductive part. Despite a lot of research has been conducted for decades, the best aspect ratio of the micro hole using micro-EDM has not been over 30, yet. In the present study, new fabrication scheme was introduced to increase the aspect ratio of micro hole dramatically. Micro holes with less than 10 aspect ratio were aligned and welded together to manufacture a micro hole with extreme aspect ratio. Alignment of the micro hole with over 380 aspect ratio was conducted by the home-made apparatus installed with microscope and laser beam. The micro hole with extreme aspect ratio was used to shape pencil beam from proton beam generated from MC-50 cyclotron. The pencil beam was utilized to machine test specimen whose result was compared with GEANT4 computer simulation. It was shown that the experimental and simulation result were closer as the aspect ratio of the micro hole was bigger.

Electrical Conductivity of Carbon Fiber-Polymer Composite (Carbon 화이버-폴리머 복합체의 전기적 특성)

  • 이재연;최경만
    • Journal of the Korean Ceramic Society
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    • v.35 no.6
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    • pp.603-609
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    • 1998
  • The composites of insulating polymer filled with conducting carbon-fiber were fabricated by molding press method. To understand the fiber aspect-ratio dependence of electrical conductivity the aspect ratio was varied from 4 to 10 The percolation thresholds of transition from the insulator to the conductor de-creased as the fiber aspect ratio increased. The percolation threshold of fiber-segregated composite in this study was smaller than that of fiber-random composite shown in other study. When the electrical con-ductivity curves were fitted by general effective medium equation morphological variable(t) decreased as the fiber aspect-ratio increased.

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A Study on Prediction of Young's Modulus of Composite with Aspect Ratio Distribution of Short Fiber (장단비 분포를 갖는 단섬유 복합재의 영계수 예측에 대한 연구)

  • Lee, J.K.
    • Journal of Power System Engineering
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    • v.10 no.4
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    • pp.99-104
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    • 2006
  • Young's modulus of composite has been predicted by Eshelby's equivalent inclusion method modified with Mori-Tanaka's mean field theory, where short fibers of aspect ratio distribution are assumed to be aligned. Young's modulus of the composite is predicted with the smallest class interval for simulating the actual distribution of fiber aspect ratio, which is compared with that computed using different class intervals. Young's modulus of the composite predicted with mean aspect ratio or the largest class interval is overestimated by the maximum 10%. As the class interval of short fibers for predicting Young's modulus decreases, the predicted results show good agreements with those obtained using the actual distribution of fiber aspect ratio. It can be finally concluded from the study that if and only if the class interval of short fiber normalized by the maximum aspect ratio is smaller than 0.1, the predicted results are consistent with those obtained using the actual distribution of aspect ratio.

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Influence of an Aspect Ratio of Rectangular Channel on the Cooling Performance of a Multichip Module

  • Choi, Min-Goo;Cho, Keum-Nam
    • Journal of Mechanical Science and Technology
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    • v.14 no.3
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    • pp.350-357
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    • 2000
  • Experiments were performed by using PF-5060 and water to investigate the influence of an aspect ratio of a horizontal rectangular channel on the cooling characteristics from an in-line $6{\times}1$ array of discrete heat sources which were flush mounted on the top wall of the channel. The experimental parameters were aspect ratio of rectangular channel, heat flux of simulated VLSI chip, and channel Reynolds number. The chip surface temperatures decreased with the aspect ratio at the first and sixth rows, and decreased more rapidly at a high heat flux than at a low heat flux. The measured friction factors at each aspect ratio for both water and PF-5060 gave a good agreement with the values predicted by the modified Blasius equation within ${\pm}7%$. The Nusselt number increased as the aspect ratio decreased, but the increasing rate of Nusselt number reduced as the aspect ratio decreased. A 5:1 rectangular channel yields the most efficient cooling performance when the heat transfer and pressure drop in the test section were considered simultaneously.

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The Influences of Process Parameters in Piercing with a High Aspect Ratio for Thick Aluminum Sheet (알루미늄 판재의 고 세장비 피어싱가공을 위한 작업변수의 영향)

  • Kim, J.G.;Kim, J.B.;Kim, J.H.
    • Transactions of Materials Processing
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    • v.23 no.1
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    • pp.23-28
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    • 2014
  • The aspect ratio of a hole is defined as the ratio of the thickness to the diameter of the sheet metal. Most holes in the sheet metal industry are made by piercing. However, for thick sheets, which have an aspect ratio greater than 2, a machining process like drilling instead of piercing is usually used to make holes. In the current study, piercing, which is a shearing process, is evaluated to punch a hole with a high aspect ratio by using a newly designed die set-up. The piercing die was manufactured to prevent the punch from buckling and also to improve the alignment between the die components. An aluminum alloy sheet was selected for the experiments. The influence of several process parameters such as sheet thickness, clearance and stripping force were investigated. Experimentally, a hole with an aspect ratio of 5 was pierced. The resulting hole had a clean surface and the dimensional accuracy of pierced hole was considerably improved with decreasing clearance between punch and die. It is also shown that the larger penetration depth of the effective sheared surface can be achieved for high aspect ratio piercing relative to conventional piercing with a low aspect ratio.

EFFECT OF ASPECT RATIO ON SLIP FLOW IN RECTANGULAR MICROCHANNELS

  • Islam, Md.Tajul;Lee, Yeon-Won
    • Proceedings of the KSME Conference
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    • pp.2803-2810
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    • 2007
  • Three dimensional numerical studies were carried out to investigate the effect of aspect ratio on gas slip flow in rectangular microchannels. We focused on aspect ratio effect on slip velocity, pressure distribution and mass flow rate. As aspect ratio decreases the wall slip velocity also decreases. As a result nonlinearity of pressure distribution increases. The slip velocities on sides and top/bottom walls are different and this difference decreases with increasing aspect ratio. These two velocities are equal when aspect ratio is 1. The ratios of slip mass flow rate over noslip mass flow rate increases with increasing aspect ratios.

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Heat Transfer and Pressure Drop Characteristics for Various Tube Geometries in Modular Tube Bundle Heat Exchanger (모듈형 관군 열교환기에서의 관 형상에 따른 열전달 및 압력강하 특성에 관한 연구)

  • Yoon, Joon-Shik;Park, Byung-Kyu;Kim, Cham-Jung
    • Proceedings of the KSME Conference
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    • pp.105-111
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    • 2000
  • A numerical study has been performed to obtain the heat transfer and pressure drop characteristics for shell-and-tube heat exchanger with various shapes of tubes. The Tubes have variation of Aspect Ratio, Pitch and Rotation. Results are presented as plots of Colburn j factor and friction factor f against Aspect Ratio, Pitch and Rotation. As Aspect Ratio increases, j factor and f factor decreases. As Pitch increases, j factor decreases. j/f have optimized Pitch for each Aspect Ratio. Accordingly, there is fitness of Aspect Ratio and Pitch fur most effective cases. The Rotation of tubes are of no meaning for both heat transfer and pressure drop.

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Effects of Fiber Aspect Ratio, Fiber Content, and Bonding Agent on Tensile and Tear Properties of Short-Fiber Reinforced Rubber

  • Lee, Dong-Joo;Ryu, Sang-Ryeoul
    • Journal of Mechanical Science and Technology
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    • v.15 no.1
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    • pp.35-43
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    • 2001
  • Both tensile and tear properties of short-fiber reinforced Chloroprene rubber have been studied as functions of the fiber aspect ratio and fiber content. Both properties increased when both the fiber aspect ratio and fiber content were increased. The fiber reinforced rubbers exhibited maximum values of these properties at a fiber aspect ratio of about 300. When the fiber aspect ratio exceeds 400, the mechanical properties decreased with the fiber content because of the non-uniform dispersion of fibers. The tensile modulus was compared with the prediction by the Halpin-Tsai equations for randomly oriented cases. A bonding agent was used in the fiber treating process. It was found that the ultimate tensile strength, torque, tearing energy and tensile modulus of the rubbers with treated fibers were much higher than those with untreated ones.

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Experimental and Improved Numerical Studies on Aerodynamic Characteristics of Low Aspect Ratio Wings for a Wing-In Ground Effect Ship

  • Ahn, Byoung-Kwon;Kim, Hyung-Tae;Lee, Chang-Sup;Lew, Jae-Moon
    • Journal of Ship and Ocean Technology
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    • v.12 no.3
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    • pp.14-25
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    • 2008
  • Recently, there has been a serious effort to design a wing in ground effect (WIG) craft. Vehicles of this type might use low aspect ratio wings defined as those with smaller than 3. Design and prediction techniques for fixed wings of relatively large aspect ratio are reasonably well developed. However, Aerodynamic problems related to vortex lift on wings of low aspect ratio have made it difficult to use existing techniques. In this work, we firstly focus on understanding aerodynamic characteristics of low aspect ratio wings and comparing the results from experimental measurements and currently available numerical predictions for both inviscid and viscous flows. Second, we apply an improved numerical method, "B-spline based high panel method with wake roll-up modeling", to the same problem.