한국정보통신설비학회:학술대회논문집

Korea Institute of Information and Telecommunication Facilities Engineering (한국정보통신설비학회)
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Fabrication and Characterization of Single Crystalline Silicon (SCS) RF MEMS Switch

단결정 실리콘 RF MEMS 스위치의 제작 및 특성 평가

  • Kim Jong-Man (School of Electrical and Computer Science, Seoul National University) ;
  • Lee Sang-Hyo (School of Electrical and Computer Science, Seoul National University) ;
  • Baek Chang-Wook (School of Electrical and Electronics Engineering, Chung-Ang University) ;
  • Kwon Young-Woo (School of Electrical and Computer Science, Seoul National University) ;
  • Kim Yong-Kweon (School of Electrical and Computer Science, Seoul National University)
  • 김종만 (서울대학교 전기컴퓨터공학부) ;
  • 이상효 (서울대학교 전기컴퓨터공학부) ;
  • 백창욱 (중앙대학교 전자전기공학부) ;
  • 권영우 (서울대학교 전기컴퓨터공학부) ;
  • 김용권 (서울대학교 전기컴퓨터공학부)
  • Published : 2006.08.01
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Abstract

This paper deals with a single crystalline silicon (SCS) RF MEMS switch for telecommunication system applications. The proposed SCS switch was fabricated using a silicon-on-glass (SiOG) process and its performances in terms of RF responses, switching time, lifetime were characterized. The proposed SCS switch consists of movable plates, mechanical spring structures, which are composed of robust SCS, resulting in mechanically good stability, The measured actuation voltage was 30 V, and with this applied voltage, the insertion loss and isolation characteristics were measured to be 0.05 and 44.6 dB at 2 GHz respectively. The measured switch ON and OFF time were 13 and $9{\mu}s$, respectively. The lifetime of the fabricated switch was tested. Even after over 1 billion cycles repeated ON/OFF actuations, the switch maintained its own characteristics.

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