Direct Deposition of Polycrystalline Silicon Films on Plastic Substrates using the Catalytic CVD Technique

  • Hong, Wan-Shick (Dept. of Nano Science and Technology, University of Seoul) ;
  • Kim, Tae-Hwan (Dept. of Nano Science and Technology, University of Seoul) ;
  • Lee, Kyung-Min (Dept. of Nano Science and Technology, University of Seoul)
  • 발행 : 2007.11.16