Fabrication and performance analysis of air gap type thin film bulk acoustic wave resonator

  • Ahn, Young-Bae (School of Materials Science & Engineering, Seoul National University) ;
  • Lee, Jong-Ho (School of Materials Science & Engineering, Seoul National University) ;
  • Kim, Hyeong-Joon (School of Materials Science & Engineering, Seoul National University)
  • Published : 2007.11.16