한국결정학회:학술대회논문집 (Proceedings of the Korea Crystallographic Association Conference)
- 한국결정학회 2007년도 추계학술연구발표회 및 정기총회
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- Pages.47-47
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- 2007
Dry etching of SiC in inductively coupled $SF_6/O_2$ Plasma
- Yim, Jeong-Hyuk (School of Materials Scienceand Engineering, Seoul National University) ;
- Lee, Jong-Ho (School of Materials Scienceand Engineering, Seoul National University) ;
- Song, Ho-Keun (School of Materials Scienceand Engineering, Seoul National University) ;
- Moon, Jeong-Hyun (School of Materials Scienceand Engineering, Seoul National University) ;
- Seo, Han-Seok (School of Materials Scienceand Engineering, Seoul National University) ;
- Oh, Myeong-Sook (School of Materials Scienceand Engineering, Seoul National University) ;
- Lee, Jae-Bin (R&D Center, Sangshin Elecom) ;
- Kim, Hyeong-Joon (School of Materials Scienceand Engineering, Seoul National University)
- 발행 : 2007.11.16