Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 1 Issue 3
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- Pages.371-375
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- 1992
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- 1225-8822(pISSN)
Composition and Automation of Electrical Property Measurement System for Thin Films
박막의 전기적 특성평가를 위한 측정 시스템의 구성 및 자동화
Abstract
Low cost, PC controlled electrical property measurement systems were constructed to study thin film characteristics such as ; I-V, C-V, C-t, and low current. In addition, a GPIB card and C language program for data control and analysis were made for this study.
Keywords