Applied Chemistry for Engineering (공업화학)

The Korean Society of Industrial and Engineering Chemistry (한국공업화학회)
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Preparation and Application of Silicon alkoxide

실리콘알콕사이드의 합성기술과 응용

  • Rho, Jae-Seong (Dept. of Fine Chemicals Engineering and Chemistry College of Engineering, Chungnam National University) ;
  • Yang, Hyun-Soo (Dept. of Fine Chemicals Engineering and Chemistry College of Engineering, Chungnam National University) ;
  • Cho, Heon-Young (Dept. of Fine Chemicals Engineering and Chemistry College of Engineering, Chungnam National University) ;
  • Cho, Tae-Woong (Dept. of Fine Chemicals Engineering and Chemistry College of Engineering, Chungnam National University)
  • 노재성 (충남대학교 공과대학 정밀공업화학과) ;
  • 양현수 (충남대학교 공과대학 정밀공업화학과) ;
  • 조헌영 (충남대학교 공과대학 정밀공업화학과) ;
  • 조태웅 (충남대학교 공과대학 정밀공업화학과)
  • Received : 1993.03.19
  • Published : 1993.05.01
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Abstract

Silicon alkoxides are used as a raw materials of silica fibers, coating films and fine ceramics. Specially, the alkoxides have been confirmed the best raw material for VLSI thin film of computors in recent years. Because, the impotance of silicon alkoxides are increasing more and more now a days. And so, in thls report the synthetic methods, reaction mechanism, application fields of silicon alkoxides are summerized. Also, the results of our research and technical problems of silicon alkoxide preparation are introduced briefly.

실리콘알콕사이드는 실리카섬유와 박막재료 및 각종 세라믹스의 합성원료로써 필수적인 물질이 되었으며, 최근에는 16MD램 이상의 초고도 전자제품의 VLSI용 박막 원료로 각광을 받게 되면서 그 중요성이 더한층 강조되고 있다. 따라서 본 본문에서는 실리콘알콕사이드의 각종 합성방법과 반응기구 및 응용분야 등을 요약 정리하고, 실리콘알콕사이드 합성에 관한 본 연구팀의 연구결과 및 문제점을 간략하게 소개하였다.

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