Applied Chemistry for Engineering (공업화학)

The Korean Society of Industrial and Engineering Chemistry (한국공업화학회)
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Fabrication and Characteristics of SnO2 Thick Film Devices for Detection of NO2

NO2 감지용 SnO2 후막소자의 제작 및 특성

  • Sohn, Jong Rack (Dept. of Industrial Chemistry, Engineering College, Kyungpook National University) ;
  • Han, Jong Soo (Dept. of Industrial Chemistry, Engineering College, Kyungpook National University)
  • 손종락 (경북대학교 공과대학 공업화학과) ;
  • 한종수 (경북대학교 공과대학 공업화학과)
  • Received : 1997.02.06
  • Accepted : 1997.03.14
  • Published : 1997.04.10
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Abstract

$SnO_2$ as raw material of sensor for $NO_2$ detection was prepared by precipitating $SnCl_4$ solution with aqueous ammonia followed by calcining in air. The characterization of $SnO_2$ was carried out using FT-IR and XRD, and $SnO_2$ thick film sensor was fabricated by screen-printing method. The particle size of $SnO_2$ calcined at higher temperature increased due to the growth of crystalline. $SnO_2$ sensor fabricated by using $SnO_2$ sample calcined at $1000^{\circ}C$ followed by heat treatment at $700^{\circ}C$ exhibited excellent sensing characteristics and selectivity for $NO_2$ gas at the operating temperature of $250^{\circ}C$.

$NO_2$기체의 감지를 위한 sensor의 원료물질로 $SnO_2$를 사용하였으며 $SnCl_4$ 용액을 암모니아수로 침전시킨 후 공기중에 하소하여 $SnO_2$를 제조하였다. $SnO_2$의 특성을 XRD 및 IR로 연구하였으며 스크린-프린팅법으로 $SnO_2$후막소자를 제작하였다. 하소온도가 높을수록 $SnO_2$의 입자의 크기는 결정의 성장으로 증가하였다. $1000^{\circ}C$에서 하소된 $SnO_2$분말을 가지고 만든 소자를 $700^{\circ}C$에서 열처리하여 제작된 $SnO_2$소자는 동작온도 $250^{\circ}C$에서 $NO_2$기체에 대한 우수한 감지특성과 선택성을 나타내었다.

Keywords

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