Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
권호 표지

Fabrication and evaluation of NSOM apparatus

NSOM장치의 제작 및 특성 평가

  • ;
  • A.K. Viswanath ;
  • ;
  • ;
  • 이주인 (한국표준과학연구원 양자표준부) ;
  • ;
  • 유성규 (한국표준과학연구원 양자표준부) ;
  • 신정규 (광주과학기술원 정보통신공학과) ;
  • 유필원 (광주과학기술원 정보통신공학과)
  • Published : 1999.12.01
Download PDF
⟨ Previous Next ⟩

Abstract

W made a near-field optical microscope(NSOM) apparatus and evaluated it. To control the distance between a tip and a sample, we used a piezoelectric translator and a He-Ne laser, and consequently obtained the spatial resolution better than 100nm. For the semiconductor spectroscopic applications, we performed photoluminescence and photocurrent experiments on the GaAs/AlGaAs MQWs samples. In the case of PL experiment, we obtained the low signal to nose ration due to the extremely small power of a light source passing through the nanometric optical fiber tip. However photocurrent experiment shows a hundred times better signal to noise than that of PL experiment. This suggests that photocurrent experiment using NSOM have the possibility to provide the spatial resolution better than 10nm.

Keywords