Journal of Institute of Control, Robotics and Systems (제어로봇시스템학회논문지)

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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An RTP Temperature Control System Based on LQG Design

LQG 설계에 의한 RTP 온도제어 시스템

  • 송태승 (충남대학교 전자공학과) ;
  • 유준 (충남대학교 전자공학과)
  • Published : 2000.06.01
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Abstract

This paper deals with wafer temperature uniformity control essential in rapid thermal processing (RTP). One of the important control objectives of RTP is to keep the temperature over the wafer surface as uniformly as possible. For this, a discrete time state equation around the operating point is first identified by using the subspace fitting method, and a multivariable LQG(Linear Quadratic Gaussian) controller is designed based on the identified model. Simulation and experimental results show improvement in temperature uniformity over the conventional PID method.

Keywords

References

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