정보저장기기용 마이크로 액추에이터

References

1. Data Storage TPI growth is key to delaying superpara magnetism's arrival Howell, T.;Ehrlich, R.
2. IEEE Trans. on Mag. v.35 no.2 Piezoelectric micro actuator for dual stage control Evans, R. B.;Griesbach, J. S.;W. C. Messner
3. Journal of Microelectromechanical Systems v.7 no.2 Design and Fabrication of an Angular Microactuator for Magnetic Disk Drives Horsley, D. A.;Cohn, M. B.;Singh, A.;Horowitz, R.;Pisano, A. P.
4. 제5회 대한 전기학회 MEMS 심포지움 MEMS 마이크로 액츄에이터를 채용한 고밀도 HDD용 이단 구동 제어 시스템 전종업;정성환;최재준;김철순;민동기
5. IEEE Trans. on Mag. v.35 no.2 A Microactuator for Head Positioning System of Hard Disk Drives Fujita, H.;Suzuki, K.;Ataka, M.;Nakamura, S.
6. Proc. Actuator 2000 Optimal Shape Design of Curved Electrodes for a Rotary Micro actuator Jung, S. H.;Jeon, J. U.;Pak, Y. E.;Lee, S. H.
7. SPIE 2001 Electromagnetic Micro x y Stage with Very Thick Cu coil for Probe-based Mass Data Storage Device Choi, J. J.;Park, H. S.;Kim, K. Y;Jeon, J. U.