Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
권호 표지

Filtered Plasma Deposition and MEVVA Ion Implantation

  • Liu, A.D. (The Institute of Low Energy Nuclear Physics, Beijing Radiation Center, Beijing Normal University) ;
  • Zhang, H.X. (The Institute of Low Energy Nuclear Physics, Beijing Radiation Center, Beijing Normal University) ;
  • Zhang, T.H.
  • Published : 2003.10.01
Download PDF
⟨ Previous Next ⟩

Abstract

The modification of metal surface by ion implantation with MEVVA ion implanter and thin film deposition with filtered vacuum arc plasma device is introduced in this paper. The combination of ion implantation and thin film deposition is proved as a better method to improve properties of metal surface.

Keywords

References

  1. I. G., Brown, Galvin, J. E. and MacGill, R. A., Appl. Phys. Lett. 47, 358 (1985). https://doi.org/10.1063/1.96163
  2. Brown, I. G., Galvin, I. E., Gavin, B. F. and MacGill, R. A., Rev. Sci. Instrum., 57, 1069 (1986) https://doi.org/10.1063/1.1138660
  3. I. G, Brown, The Physics and Technology of Ion Sources, Wiley, New York, (1989)
  4. A. D. Liu, H. X. Zhang, T. H. Zhang, X. J. Zhang, X. Y. Wu, S. J. Zhang and Q. Li, J. Korean Vacuum Science and Technology 6, 55, (2002)
  5. Z. Tonghe, Z. Huixing, J. Changzhou, Z. Xiaoji, W. Yuguang, M. Furong, L. Hong, S. Hanzhang, and S. Jianzhong, Surface and Coating Technology, 128-129, 1 (2000)
  6. Zhang Tonghe, Wu Yuguang, Liu Andong and Zhang Xu, J. Beijing Nomial University (Natural Science) 38, 620 (2002)
  7. Zhang Tonghe, Wu Yuguang, Liu Andong, Zhang Xu and Wang Xiaoyan, Nuclear Techniques 26, 582 (2003)
  8. Zhang Tong-he, Wu Yu-guang, Liu An-dong, Zhang Xu and Wang Xiao-yan, Chin. Phys. Lett. 20, 1548 (2003) https://doi.org/10.1088/0256-307X/20/9/340
  9. Wu Yuguang, Zhang Tonghe, Liu Andong and Zhang Huixing, J. Beijing Normal University (Natural Science) 38, 755 (2002)
  10. Wu Yuguang, Zhang Tonghe, Zhang Xu, and Liu Andong, J. Beijing Normal University (Natural Science), 38, 352 (2002)