Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 2 Issue 4
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- Pages.31-35
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- 2003
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- 1738-2270(pISSN)
The Formation Technique of Thin Film Heaters for Heat Transfer Components
열교환 부품용 발열체 형성기술
Abstract
We present a formation technique of thin film heater for heat transfer components. Thin film structures of Cr-Si have been prepared on top of alumina substrates by magnetron sputtering. More samples of Mo thin films were prepared on silicon oxide and silicon nitride substrates by electron beam evaporation technology. The electrical properties of the thin film structures were measured up to the temperature of
Keywords
- Electron-beam Evaporation;
- Magnetron Sputtering;
- Thin Films;
- Semiconductor Thermal Processing;
- Surface Resistance;
- Scanning Electron Microscopy (SEM);
- Auger Electron Spectroscopy (AES)