Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Measurement of mechanical properties of SU-8 thin film by tensile testing

단축 인장에 의한 SU-8박막의 기계적 물성 측정

  • 백동천 (한국과학기술원 기계공학과) ;
  • 박태상 (한국과학기술원 기계공학과) ;
  • 이순복 (한국과학기술원 기계공학과) ;
  • 이낙규 (한국생산기술연구원)
  • Published : 2004.06.01
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Abstract

Thin film is one of the most general structures used in micro-electro-mechanical systems (MEMS). To measure the mechanical properties of SU-8 film, tensile testing was adopted which offers not only elastic modulus but also yield strength and plastic deformation by load-displacement curve. Tensile testing system was constructed with linear guided servo motor for actuation, load cell for force measurement and dual microscope for strain measurement.

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