Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 3 Issue 3
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- Pages.37-40
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- 2004
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- 1738-2270(pISSN)
Flow Characteristics of Photo Resist in a Slit-Coater Nozzle
Slit-Coater 노즐에서 Photo Resist의 유동 특성
Abstract
This study presents numerical solutions of three-dimensional laminar flow-field formed by photo resist flow in a slit-coater model. We discuss on the governing equations, laminar viscosities and the computational model applied in our numerical calculation and some results. We prove that the structure of tapered-cavity aid to make uniform pressure-field and boundary effect is an important problem to improve coating uniformity. In view of uniformity improvement, it is necessary to study for the structure of cavity and flow path.
Keywords
- Slit-Coater;
- Photo Resist;
- Computational Fluid Dynamics;
- Boundary Layer Effect;
- Velocity Distribution