초정밀 선형 모터의 열$\cdot$진동 분석

Analysis of Heat and Vibration of Super-Precision Linear Motors

Linear motor can be directly applied to the system needed linear motions without rotary motions. To control high-speed and high-resolution, the development of the linear motors is recently required in the high-integrated and speed process industry This paper presents thermal and vibration analyses as well as measurement standards of the newly developed linear motors through analyzing the thermal behaviors and vibration characteristics of the advanced products. The thermal measurements are conducted for comparing the developed linear motor with the advanced linear motor and the Finite Volume Method(FVM) is used to identify the measurement results. And then the vibration measurement are carried out in the developed and advanced linear motors with respect to the speed. To identify the measurement results, the Finite Element Method is utilized in the developed and advanced linear motors, respectively. The FVM, FEM, and experiments make it possible to understand these characteristics. The improvement is suggested through their results conducted experiment and analyses.