Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Effects of PTFE and W Addition on the Anti-Wear Properties of Ni-P Coatings

PTFE 및 W 첨가가 Ni-P 도금의 내마모 특성에 미치는 영향

  • Kim, Myung-Sik (Department of Electronic Materials Engineering, The University of suwon) ;
  • Hong, Jin-Won (Department of Electronic Materials Engineering, The University of suwon) ;
  • Bae, Kyoo-Sik (Department of Electronic Materials Engineering, The University of suwon)
  • 김명식 (수원대학교 전자재료공학과) ;
  • 홍진원 (수원대학교 전자재료공학과) ;
  • 배규식 (수원대학교 전자재료공학과)
  • Published : 2007.06.30
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Abstract

Electroless Ni-P coating is widely used for chemical, electronic, and semiconductor equipment parts because of its corrosion resistance. The incorporation of chemically-inert PTFE particles into the Ni-P films improves properties such as, non-stick, anti-adhesive and better corrosion resistance. However, soft PTFE particles degrade the hardness, wear and abrasion resistance. In this study, effects of PTFE and W addition to the Ni-P-coatings were compared by the XRD, SEM, sheet resistance, contact angle, and microhardness measurements. The change in sheet resistance was negligible, but contact angle was doubled by the addition of PTFE and W. The microhardness was lower for Ni-P-PTFE, but higher for Ni-P-PTFE-W coatings, compared to that of Ni-P coatings.

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