Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
권호 표지
DOI QR코드

DOI QR Code

Active Layer Simulation for the Tolerance of Epi-layer Thickness at CaAs/AlGaAs 3-Quantum Well Quantum Cascade Lasers

GaAs/AlGaAs 3-Quantum Well 양자폭포레이저 (Quantum Cascade Lasers)에서 허용되는 에피정밀도를 위한 활성영역 모의실험

  • Lee, Hye-Jin (Nano Device Research Center, Korea Institute of Science and Technology) ;
  • Lee, Cheng-Ming (Nano Device Research Center, Korea Institute of Science and Technology) ;
  • Han, Il-Ki (Nano Device Research Center, Korea Institute of Science and Technology) ;
  • Lee, Jung-Il (Nano Device Research Center, Korea Institute of Science and Technology) ;
  • Kim, Moon-Deock (Department of Physics, Chungnam National University)
  • 이혜진 (한국과학기술연구원 나노소자연구센터) ;
  • ;
  • 한일기 (한국과학기술연구원 나노소자연구센터) ;
  • 이정일 (한국과학기술연구원 나노소자연구센터) ;
  • 김문덕 (충남대학교 물리학과)
  • Published : 2007.07.30
Download PDF
⟨ Previous Next ⟩

Abstract

For the simulation of active region in the quantum cascade lasers (QCL), we solved Schrodinger equation utilizing Runge-Kutta method and Shotting method. Wavelength, phonon resonant energy, and dipole matrix element were simulated with the variation of active region thickness. As a result of such simulation, it was suggested the tolerance range of epi-layer thickness error when 3-quantum well QCL structures are grown.

양자폭포레이저에서 활성영역의 모의실험을 위하여 Runge-Kutta 방법과 shooting 방법을 이용하여 슈뢰딩거 방정식의 해를 구하였다. 활성영역의 두께 변화에 대하여 발진파장, 포논공명 에너지, 분극행렬요소 (dipole matrix element) 등의 특성변화를 관찰하였고, 이로부터 양자폭포레이저를 위한 에피성장에서 허용될 수 있는 최소한의 두께 정밀도를 제안하였다.

Keywords

References

  1. R. Kazarinov and R. A. Suris, Sov. Phys. Semicon. 5, 707 (1971)
  2. J. Faist,F. Capasso, D. L. Sivco, C. Sirtori, A. L. Hutchinson, and A. Y. Cho, Science, 264, 553 (1994) https://doi.org/10.1126/science.264.5158.553
  3. M. Beck, D. Hofstetter, T. Aellen, J. Faist, U. Oesterle, M. Ilegems, E. Gini, and H. Melchior, Science, 295, 301 (2002) https://doi.org/10.1126/science.1066408
  4. A. Evans, J. S. Yu, J. David, L. Doris, K. Mi, S. Slivken, and M. Razeghi, Appl. Phys. Lett. 84, 314 (2004) https://doi.org/10.1063/1.1641174
  5. A. F. J. Levi, Applied Quantum Mechanics (Cambridge University, Cambridge, 2003), pp. 440-441
  6. S. B. Slivken, Quantum cascade lasers grown by gas-source molecular beam epitaxy (Evanston, Illinois, 2002)
  7. H. C. Liu, Intersubband Transitions in Quantum Wells (Academic, San Diego, 2000), p. 6
  8. C. Sirtori, P. Kruck, S. Barbieri, P. Collot, J. Nagle, M. Beck, J. Faist, and U. Oesterle, Appl. Phys. Lett. 73, 3486 (1998) https://doi.org/10.1063/1.122812
  9. C, Sitori, F. Capasso, J. Faist, and S. Scandolo, Phys. Rev. B 50, 8663 (1994) https://doi.org/10.1103/PhysRevB.50.8663
  10. J. Faist, F. Capasso, C. Sitori, D. L. Sivco, J. N. Baillargeon, A. L. Hutchinson, S. N. G. Chu, and A. Y. Cho, Appl. Phys. Lett. 68, 3680 (1996) https://doi.org/10.1063/1.115741
  11. I. Vurgaftman, J. R. Meyer, F. H. Julien, and L. R. Ram-Mohan, Appl. Phys. Lett. 73, 711 (1998) https://doi.org/10.1063/1.121976
  12. 김영주, 손기수, 한국진공학회지 1, 60 (1992)