Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 7 Issue 3
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- Pages.51-54
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- 2008
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- 1738-2270(pISSN)
Property variations of undoped ZnO thin films with deposition conditions
증착조건에 따른 undoped ZnO 박막의 특성 변화
- Nam, Hyoung-Gin (Division of Electronic Engineering, Sun Moon University) ;
- Lee, Kyu-Hwang (Division of Electronic Engineering, Sun Moon University) ;
- Cho, Nam-Ihn (Division of Electronic Engineering, Sun Moon University)
- Published : 2008.09.30
Abstract
In this study, we investigated variations in undoped ZnO thin film properties with working pressure,