반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

TRIZ를 활용한 클린룸용 저소음 및 저분진 케이블 이송 체인 시스템의 개발

The Development of Cable Carrier Chain System with Low Noise and Dust for Moving Stages in Cleanrooms using TRIZ

  • 발행 : 2009.12.31
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초록

In this paper TRIZ was used to solve noise and dust reduction related to cable carrier chain system. On modern machines in a clean room, the contradictions arose due to increase noise and dust for the high speed were eliminated with 40 principles and seperation rules. As the results, the sound pressure level of the new carrier chain system was reduced to below 40 dB(A), and cleanroom classifications was satisfied with ISO class 4. In these successful results, TRIZ showed its usefulness in solving the design problems even with severe constraints.

키워드

참고문헌

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