반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

극저온 $CO_2$ 세정공정을 위한 거친표면 위 미세입자의 점착특성 연구

A Study of Minute Particles' Adhesion on a Rough Surface for a Cryogenic $CO_2$ Cleaning Process

  • 석종원 (중앙대학교 기계공학부) ;
  • 이성훈 (중앙대학교 기계공학부 대학원) ;
  • 김필기 (중앙대학교 기계공학부 대학원)
  • Seok, Jong-Won (School of Mechanical Engineering, Chung-Ang University) ;
  • Lee, Seong-Hoon (Graduate School of Mechanical Engineering, Chung-Ang University) ;
  • Kim, Pil-Kee (Graduate School of Mechanical Engineering, Chung-Ang University)
  • 발행 : 2010.03.31
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초록

Among a variety of cleaning processes, the cryogenic carbon dioxide ($CO_2$) cleaning has merits because it is highly efficient in removing very fine particles, innoxious to humans and does not produce residuals after the cleaning, which enables us to extend its area of coverage in the semi-conductor fabrication society. However, the cryogenic carbon dioxide cleaning method has some technical research issues in aspect to particles' adhesion and removal. To resolve these issues, performing an analysis for the identification of particle adhesion mechanism is needed. In this study, a research was performed by a theoretical approach. To this end, we extended the G-T (Greenwood-Tripp) model by applying the JKR (Johnson-Kendall-Roberts) and Lennard-Jones potential theories and the statistical characteristics of rough surface to investigate and identify the contact, adhesion and deformation mechanisms of soft or hard particles on the rough substrate. The statistical characteristics of the rough surface were taken into account through the employment of the normal probability distribution function of the asperity peaks on the substrate surface. The effects of surface roughness on the pull-off force for these particles were examined and discussed.

키워드

참고문헌

  1. T. Hattori, "Contamination control: Problems and prospects," Solid State Technol., Vol. 33, No. 7, pp. 1-8, 1990. https://doi.org/10.1016/0038-1101(90)90002-V
  2. T. Hattori and S. Koyate, "An automated particle detection and identification system in VLSI wafer processing," Solid State Technol., Vol. 34, No. 9, pp. 1-6, 1991. https://doi.org/10.1016/0038-1101(91)90195-5
  3. U. C. Sung, C. N. Yoon, S. G. Kim, "Surface cleaning by ice-particle jet(II): preparation of contaminated surface and its cleaning," Korean J. of Chem. Eng, Vol. 14, No. 1, pp. 15-22. 1997. https://doi.org/10.1007/BF02706036
  4. D.R. Linger, "$CO_2$ (dry-ice) particle blasting as a mainstream cleaning alternative," Particles on Surfaces 5&6: Detection, Adhesion and Removal, pp. 203-220, 1999.
  5. S. Banerjee, C.C. Lin, S. Su, H. F. Chung, W. Brandt and K. Tang, "Cryogenic aerosol cleaning of photomasks," Proc. SPIE, Vol. 5853, No. 1, pp. 90-99, 2005.
  6. R. Kohli, "Precision cleaning and processing in industrial applications," Particles and Surfaces 5&6: Detection, Adhesion and Removal, pp. 117-134, 1999.
  7. 석종원, 이성훈, 김필기, 이주홍, "극저온 $CO_2$ 세정과 정 시 미세오염물의 탈착 메커니즘 연구," 반도체및 디스플레이장비학회지, 제7권, 제4호, pp. 29-33, 2008.
  8. K. L. Johnson, Contact Mechanics, Cambridge Univ. Press, N.Y., 1985.
  9. J. A. Greenwood, J. B. P. Williamson, "Contact of nominally flat surfaces," Proc. R. Soc. London, Ser. A, Vol. 295, No. 1442, pp. 300-319, 1966. https://doi.org/10.1098/rspa.1966.0242
  10. J. A. Greenwood, J. H. Tripp, "The elastic contact of rough spheres," ASME J. Appl. Mech., Vol. 34, pp. 153-159, 1967. https://doi.org/10.1115/1.3607616
  11. R. S. Bradley, "The cohesive force between solid surfaces and the surface energy of solids," Philosophical Magazine, Vol. 13, pp. 853-862, 1932.
  12. K. L. Johnson, K. Kendall, A. D. Roberts, "Surface energy and the contact of elastic solids," Proc. R. Soc. London, Ser A, Vol. 324, No. 1558, pp. 301-313, 1971. https://doi.org/10.1098/rspa.1971.0141
  13. B. V. Derjaguin, V. M. Muller, Y. P. Toporov, "Effect of contact deformations on the adhesion of particles," J. Collid Interface Sci. Vol. 53, No. 2, pp. 314-326, 1975. https://doi.org/10.1016/0021-9797(75)90018-1
  14. D. Tabor, "Surface forces and surface interactions," Colloid Interface Sci. Vol. 58, No. 1, pp. 2-13, 1977. https://doi.org/10.1016/0021-9797(77)90366-6
  15. V. M. Muller, Y. S. Yushchenko, B. V. Derjaguin, "On the influence of molecular forces on the deformation of an elastic sphere and its sticking to a rigid plane," J. Colloid Interface Sci. Vol. 77, No. 1, pp. 91-101, 1980. https://doi.org/10.1016/0021-9797(80)90419-1
  16. D. Maugis, "Adhesion of spheres: The JKR-DMT transition using a dugdale model," J. Colloid Interface Sci. Vol. 150, No. 1, pp. 243-269, 1992. https://doi.org/10.1016/0021-9797(92)90285-T
  17. K. L. Johnson, J. A. Greenwood, "An adhesion map for the contact of elastic spheres," J. Colloid Interface Sci. Vol. 192, No. 2, pp. 326-333, 1997. https://doi.org/10.1006/jcis.1997.4984
  18. Y. Zhao, L. Chang, "A model of asperity interactions in elastic-plastic contact of rough Surfaces," J. Tribol., Vol. 123, No. 4, pp. 857-864, 2001. https://doi.org/10.1115/1.1338482
  19. P. Sahoo, A. Banerjee, "Asperity interaction in adhesive contact of metallic rough surfaces," J. Phys. D: Appl. Phys., Vol. 38, No. 22, 4096-4103, 2005. https://doi.org/10.1088/0022-3727/38/22/013
  20. Y. I. Rabinovich, J. J. Adler, A. Ata, R. K. Singh, B.M. Moudgil, "Adhesion between nanoscale rough surfaces - I. Role of asperity geometry," J. Colloid Interface Sci., Vol. 232, No. 1, pp. 10-16, 2000. https://doi.org/10.1006/jcis.2000.7167
  21. Y. I. Rabinovich, J. J. Adler, A. Ata, R. K. Singh, B.M. Moudgil, "Adhesion between Nanoscale Rough Surfaces - II. Measurement and Comparison with Theory," J. Colloid Interface Sci., Vol. 232, No. 1, pp. 17-24, 2000. https://doi.org/10.1006/jcis.2000.7168
  22. W. Cheng, P. F. Dunn, R. M. Brach, "Surface roughness effects on microparticle adhesion," J. Adhesion, Vol. 78, No. 11, pp. 929-965, 2002. https://doi.org/10.1080/00218460214510
  23. J. A. Greenwood, "Adhesion of Elastic Spheres," Proc. R. Soc. Lond. A, Vol. 453, No. 1961, pp. 1277-1297, 1997. https://doi.org/10.1098/rspa.1997.0070
  24. Mathworks, MatlabTM version 6.5, Mathworks Inc., 2002.
  25. MapleTM Manual Release 5, Waterloo Maple Inc., 1997.
  26. N. Lyer, N. Saka, J. H. Chun, "Contamination of silicon surface due to contact with solid polymers," IEEE. Trans. Semi. Manufacturing, Vol. 14, No. 3, pp. 85-96, 2001. https://doi.org/10.1109/66.920718
  27. Q. Li, V. Rudolph, W. Peukert, "London-van der Waals adhesiveness of rough particles," Powder Technol., Vol. 161, No. 3, pp. 248-255, 2006. https://doi.org/10.1016/j.powtec.2005.10.012