반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

외부챔버와 유연한 튜브로 연결된 LCD 패널 검사기 방진용 공기 스프링의 열 및 동적 연성거동에 대한 연구: PART II, 실험적 검증 및 고찰

Study on the Thermal and Dynamic Behaviors of Air Spring for vibration isolation of LCD panel inspecting machine connected with an External Chamber through a flexible tube: PART II, Experimental validation and investigation

  • 석종원 (중앙대학교 기계공학부) ;
  • 이주홍 (중앙대학교 기계공학부 대학원) ;
  • 김필기 (중앙대학교 기계공학부 대학원)
  • 투고 : 2011.02.10
  • 심사 : 2011.02.28
  • 발행 : 2011.03.31
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초록

In this study, the dynamic characteristics of an air spring connected with an external chamber through a flexible tube are examined. The uncoupled dynamic parameters of the air spring are identified through experiments, followed by the suggestion of a model-based approach to obtain the remaining coupled dynamic parameters using the various frequency response functions derived in PART I paper [1]. To improve or control the damping characteristics of the air spring, this vibration isolation air spring system is physically established in laboratory scale. And we attempt to identify various parameters used to describe to air spring system by both theoretically [1] and experimentally, which is performed in this report. The damping parameter of the tube system is identified through experiments on the system incorporated with the air cylinder, and a nonlinear regression procedure is employed to find solutions. The resulting value is used to expect the frequency response function of dynamic pressure in the top chamber (air spring) with respect to that in the bottom chamber (external chamber). Comparison with the experimental data supports the validity of the present estimation procedures. Also, the dynamic mechanism of the damping effects particularly in a low frequency range is investigated through this experimental endeavor.

키워드

참고문헌

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