반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

대면적 플랙시블 기판용 회전자석형 마그네트론 소스 개발

Development of rotary-magnet type magnetron source for large area sputtering on flexible substrate

  • 조찬섭 (경북대학교 산업전자전기공학부) ;
  • 윤성호 ((주)울택) ;
  • 김봉환 (대구가톨릭대학교 전자공학과) ;
  • 김광태 (경북대학교 산업전자전기공학부) ;
  • 정영철 (경주대학교 컴퓨터정보공학과) ;
  • 이종현 (경북대학교 전자공학부)
  • 투고 : 2012.02.27
  • 심사 : 2012.04.30
  • 발행 : 2012.06.30
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초록

In this study, a high performance rotary magnet type magnetron source for roll-to-roll sputter system has been developed. We analyzed the density of magnetic field as a function of size variation of the magnet which are in the center and edge of the target. The target efficiency showed the best result when the width of center magnet, the width of edge magnet, the angle of edge magnet, and the rotation angle of Yoke are 20mm, 10mm, $56^{\circ}$, and $16^{\circ}$, respectively. On the basis of the results of magnet array, Roll-to Roll magnetron source was fabricated and tested. The uniformity of the film thickness and that of the sheet resistance was ${\pm}1.62%$ and ${\pm}4.13%$, and the resistivity was $2.79{\times}10^{-3}W{\cdot}cm$.

키워드

참고문헌

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