Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Optical Properties of ZnO-ZnMgO Quantum Wells Grown by Atomic Layer Deposition Technique

원자층 증착법으로 성장한 ZnO-ZnMgO 양자우물의 광전이 특성

  • Shin, Y.H. (Institute of Nanosensors and Biotechnology and Department of Applied Physics, Dankook University) ;
  • Kim, Yongmin (Institute of Nanosensors and Biotechnology and Department of Applied Physics, Dankook University)
  • 신용호 (단국대학교 나노센서 바이오테크놀로지 연구소 & 응용물리학과) ;
  • 김용민 (단국대학교 나노센서 바이오테크놀로지 연구소 & 응용물리학과)
  • Received : 2012.10.30
  • Accepted : 2012.12.20
  • Published : 2013.01.30
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Abstract

We fabricated ZnO-ZnMgO single quantum well (SQW) samples having different well-widths by using the atomic layer deposition technique. The QW samples exhibit different optical transition behaviors with different QW widths. We confirm that when the well-width of 1.5 nm does not have a confined quantum energy level due to the Mg diffusion into the well caused by after-thermal treatment whereas the QWs wider than 1.5 nm show optical transitions between the confined energy levels.

원자층 증착법을 이용하여 서로 다른 양자우물 폭을 갖는 ZnO-ZnMgO 양자우물들을 제작하였다. 제작된 시료들은 양자우물 폭에 따라 서로 다른 광전이 특성을 나타내는데 우물 폭이 1.5 nm인 시료의 경우 후 열처리에 따른 Mg의 확산에 따라 양자화된 에너지 준위가 형성되지 않았고 이보다 더 넓은 폭을 갖는 시료들의 경우 양자화된 준위의 광전이를 보임을 확인하였다.

Keywords

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