한국분무공학회지 (Journal of ILASS-Korea)

  • 제18권3호
  • /
  • Pages.146-154
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  • 2013
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  • 1226-2277(pISSN)
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  • 2288-9051(eISSN)
한국분무공학회 (Institute for Liquid Atomization and Spray Systems-Korea)
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스핀 코팅에서의 액막의 흐름

The Flow of a Liquid Film on Spin Coating

  • 김태성 (삼성SDI 생산기술연구팀)
  • 투고 : 2013.09.10
  • 심사 : 2013.09.23
  • 발행 : 2013.09.30
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초록

The flow of a liquid film on spin coating is investigated in the case that the fixed volume of a liquid is placed on the center of a stationary disk. Thin film equations that are well approximated when the characteristic length in the vertical direction is much smaller than that in the radial direction (${\varepsilon}{\ll}1$) and have already been proposed in the work of T.-S. Kim & M.-U. Kim (2009), are used. The differential equation that governs the free surface of a liquid when ${\varepsilon}{\ll}1$ and ${\varepsilon}Re{\ll}1$ is also derived. The basic flow is analyzed using the thin film equations and their results are compared to the results of Navier-Stokes equations.

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참고문헌

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  8. T.-S. Kim and M.-U. Kim, "The flow and hydrodynamic stability of a liquid film on a rotating disc", Fluid Dyn. Res., Vol. 41, No. 3, 2009, pp. 035504. https://doi.org/10.1088/0169-5983/41/3/035504