Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A Study of the Device Development for the Contamination Detection in the Delivery Line

유체배관 오염 검출장치 개발에 관한 연구

  • 정이하 (한국기술교육대학교 디자인공학과) ;
  • 김병한 ((주)에스지엠) ;
  • 홍주표 (한국기술교육대학교 디자인공학과)
  • Received : 2015.03.02
  • Accepted : 2015.03.23
  • Published : 2015.03.31
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Abstract

Process gases with vapor or liquid phase as well as gas phase may experience alteration in itself or be contaminated in the fluid pipe to the process chamber. And thus it result in as particles or defects on the substrates in semiconductor, LCD, LED manufacturing. Purifiers and filters are used for control of contamination. However, none of detection device is available in the delivery line. In this paper, we propose simple device with lighting and sensing in order to predict contamination of the fluid or the tube wall. For some general purpose gases, it showed constant voltage output regardless of the flow rates. But, the smoke and the moisture in the air lowered the figure due to its concentration. Numerical values for several solid and liquid media were obtained. And, the operating temperature tendency was investigated.

Keywords

References

  1. Ryoo, H.C., Yoo, Y.S., Lee, J.Y., and Hahn, J.W., "Integrated Cavity Output Spectroscopy Using an External Cavity Diode Laser for the Density Absorption Measurement of Trace Gases," J. of the Korean Vacuum Society, Vol. 15, No. 1, pp. 24-30, 2006
  2. Shin, E.C., Cho, S.J., Ryoo, H.N., Shelefontyuk, D., and Kim, D.H., "Development of Optical Particle Counter (OPC)," Optical Society Korea Summer Meeting, pp. 280-281, 2004
  3. Bae G.N., "Investigation of the Performance Characteristics of an In-Situ Particle Monitor at Low Pressures Using Aerodynamic Lenses," J. KSME B, Vol. 24, No. 10, pp. 1359-1367, 2000
  4. Jeon, K.M., Shin, J.S., Lim, S.K., Park, S.H., Kang, B.K., Yun, J.U., Yun, J.Y., Shin, Y.H., and Kang, S.W., "The Study of In-situ Diagnosis of Chemical Vapor Deposition Processes," J. of the Korean Vacuum Society, Vol. 20, No. 2, pp. 86-92, 2011. https://doi.org/10.5757/JKVS.2011.20.2.086
  5. Lee, C.H., Jeon, K.M., Shin, J.S, Yun, J.Y., Cho, S., and Kang, S.W., "The Development of the Contamination Prevention Module of an Optical Window Using Ultrasonic Waves," J. of the Korean Vacuum Society, Vol. 22, No. 4, pp. 175-180, 2013. https://doi.org/10.5757/JKVS.2013.22.4.175
  6. Ko, D.G., Bae, S.W., Kim, K.S., and Im, I.T., "Monitoring of the Carbon Emission and Energy Consumption of CVD and Etcher for Semiconductor Manufacturing," J. of the Semiconductor & Display Technology, Vol. 12, No. 3, pp.19-22, 2013.
  7. Kang, I.H., and Lee, C.H., "Characteristics of Smoke Emissions from Light Duty Diesel Vehicles Using Light Extinction Smoke Measurement Method under free Acceleration Test Mode," J. of the KOSOS, Vol. 27, No. 3, pp. 1-8, 2012.
  8. Kong, H., Ossia, C.V., Han, H.G., and Markova, L., "In-line Smart Oil Sensor for Machine Condition Monitoring," J. of the KSTLE, Vol. 24, No. 3, pp. 111-121, 2008.
  9. Senba Optical Electronic Co., Ltd. 'Super-current Linear Light Sensor Type : LLS08-A'.