반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

반도체 Wafer용 Grinder의 안정화 설계

Design Alterations of a Grinder of Semiconductor Wafer for the Improved Stability

  • 투고 : 2017.03.16
  • 심사 : 2017.03.27
  • 발행 : 2017.03.31
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

One of the most critical aspects of the modern semiconductor industry is the quality of wafer surface, the roughness of which is mostly caused by the ingot slicing. And the grinding is supposed to be the main process to reduce the surface roughness. The vibrations of the disc surface grinder are the major problem to effectively achieve the required surface quality. In this study, the structure of a disc surface grinder was analyzed through the experiment and the computer simulation to investigate the dynamic characteristics of the machine, and further to alter the design for the improved stability. The result of the study shows that simple design alterations without alternating main body can effectively suppress the vibrations of the machine.

키워드

참고문헌

  1. Park Y. R, "Design Alterations of a Semiconductor Wafer Edge Grinder for the Improved Stability", Kumoh National Institute of Technology, Graduate School, The Master's Thesis, 2015.
  2. Yi I. H, "design Alteration of a Polishing Machine for the Improved Structural Stability," Kumoh National Institute of Technology, Graduate School, The Master's Thesis, 2013.
  3. Kim G. H, "Design Alteration of a DVR Monitor Structure for the Improved Dynamic Stability", Kumoh National Institute of Technology, Graduate School, The Master's Thesis, 2008.
  4. Kim G. H, "Design Alteration of a All in One PC for the Improved Stability", Kumoh National Institute of Technology, Graduate School, The Master's Thesis, 2013.
  5. Lim Y. H, "Design Alteration of a Grinding Machine Structure for the Improved Stability" Kumoh National Institute of Technology, Graduate School, The Master's Thesis, 2007.
  6. Kim Y. J, "Effect of design alterations of a machining center for the vibration suppression" Kumoh National Institute of Technology, Graduate School, The Master's Thesis, 2016.
  7. Ro S. H, Shon J. Y, "Design of a Mobile Phone Structure for the Improved Stability," The Korean Society of Manufacturing Process Engineers, Vol. 3, pp. 20-30, 2005.
  8. Park Y. R, Ro S. H, "Stability Design of a Laser Cutter for the Strengthened Glass" The Korean Society of semiconductor & Display Technology, Vol. 14, pp. 19-25, 2015.
  9. Ro S. H, "Mechanical Vibrations with Applications", Chaos Book, 2011.