미세구조를 활용한 고감도 압력센서

  • 심우영 (연세대학교 신소재공학과)
  • Published : 2017.06.30

Abstract

Keywords

References

  1. M. L. Hammock, A. Chortos, B. C. K. Tee, J. B. H. Tok, Z. Bao, "25th anniversary article: The evolution of electronic skin (e-skin): a brief history, design considerations, and recent progress," Adv. Mater., 25 5997-6038 (2013). https://doi.org/10.1002/adma.201302240
  2. Y. Zang, F. Zhang, C. Di, D. Zhu, "Advances of flexible pressure sensors toward artificial intelligence and health care applications," Mater. Horiz., 2 140-156 (2015). https://doi.org/10.1039/C4MH00147H
  3. S. C. B. Mannsfeld, B. C.-K. Tee, R. M. Stoltenberg, C. V. H.-H. Chen, S. Barman, B. V. O. Muir, A. N. Sokolov, C. Reese, Z. Bao, "Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers" Nat. Mater., 9 859-864 (2010). https://doi.org/10.1038/nmat2834
  4. C. Pang, G. Lee, T. Kim, S. Kim, H. Kim, S. Ahn, K. Suh, "A flexible and highly sensitive strain-gauge sensor using reversible interlocking of nanofibres," Nat. Mater., 11 795-801 (2012). https://doi.org/10.1038/nmat3380
  5. J. Park, Y. Lee, J. Hong, M. Ha, Y.-D. Jung, H. Lim, S. Y. Kim, H. Ko, "Giant Tunneling Piezoresistance of Composite Elastomers with Interlocked Microdome Arrays for Ultrasensitive and Multimodal Electronic Skins," ACS nano, 8 4689-4697 (2014). https://doi.org/10.1021/nn500441k
  6. S. Park, H. Kim, M. Vosgueritchian, S. Cheon, H. Kim, J. H. Koo, T. R. Kim, S. Lee, G. Schwartz, H. Chang, Z. Bao, "Stretchable Energy-Harvesting Tactile Electronic Skin Capable of Differentiating Multiple Mechanical Stimuli Modes," Adv. Mater., 26 7324-7332 (2014). https://doi.org/10.1002/adma.201402574
  7. C. Pang, J. H. Koo, A. Nguyen, J. M. Caves, M.-G. Kim, A. Chortos, K. Kim, P. J. Wang, J. B.-H. Tok, Z. Bao, "Highly Skin-Conformal Microhairy Sensor for Pulse Signal Amplification" Adv. Mater., 27 634-640 (2015). https://doi.org/10.1002/adma.201403807
  8. N. Ozkaya, M. Nordin, D. Goldsheyder, D. Leger, "Fundamentals of Biomechanics: Equilibrium, Motion, and Deformation," Springer, New York Ch.15 (2012).
  9. C. L. Choong, M. B. Shim, B. S. Lee, S. Jeon, D. S. Ko, T. H. Kang, J. Bae, S. H. Lee, K. E. Byun, J. Im, Y. J. Jeong, C. E. Park, J. J. Park, U. I. Chung, "Highly Stretchable Resistive Pressure Sensors Using a Conductive Elastomeric Composite on a Micropyramid Array," Adv. Mater., 26 3451-3458 (2014). https://doi.org/10.1002/adma.201305182
  10. D. J. Lipomi, M. Vosgueritchian, B. C.-K. Tee, S. L. Hellstrom, J. A. Lee, C. H. Fox, Z. Bao, "Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes," Nat. Nanotechnol., 6 788-792 (2011). https://doi.org/10.1038/nnano.2011.184
  11. R. D. P. Wong, J. D. Posner, V. J. Santos, "Flexible microfluidic normal force sensor skin for tactile feedback," Sensors and Actuators A, 179 62-69 (2012). https://doi.org/10.1016/j.sna.2012.03.023
  12. C. M. Boutry, A. Nguyen, Q. O. Lawal, A. Chortos, S. Rondeau-Gagne, Z. Bao, "A Sensitive and Biodegradable Pressure Sensor Array for Cardiovascular Monitoring," Adv. Mater., 27 6954-6961 (2015). https://doi.org/10.1002/adma.201502535
  13. K. Lee, J. Lee, G. Kim, Y. Kim, S. Kang, S. Cho, S. Kim, J. Kim, W. Lee, D. Kim, S. Kang, D. Kim, T. Lee, W. Shim, "Rough-Surface-Enabled Capacitive Pressure Sensors with 3D Touch Capability," Small, DOI: 10.1002/smll.201700368 (2017).
  14. C. Wang, D. Hwang, Z. Yu, K. Takei, J. Park, T. Chen, B. Ma, A. Javey, "User-interactive electronic skin for instantaneous pressure visualization." Nat. Mater. 12, 899-904 (2013). https://doi.org/10.1038/nmat3711
  15. C. Pan, L. Dong, G. Zhu, S. Niu, R. Yu, Q. Yang, Y. Liu, Z. L. Wang, "High-resolution electroluminescent imaging of pressure distribution using a piezoelectric nanowire LED array." Nat. Photon. 7, 752-758 (2013) https://doi.org/10.1038/nphoton.2013.191
  16. C. Pan, M. Chen, R. Yu, Q. Yang, Y. Hu, Y. Zhang, Z. L. Wang, "Progress in Piezo-Phototronic-Effect- Enhanced Light-Emitting Diodes and Pressure Imaging." Adv. Mater. 28, 1535-1552 (2016). https://doi.org/10.1002/adma.201503500
  17. X. Wang, H. Zhang, R. Yu, L. Dong, D. Peng, A. Zhang, Y. Zhang, H. Liu, C. Pan, Z. L. Wang, "Dynamic Pressure Mapping of Personalized Handwriting by a Flexible Sensor Matrix Based on the Mechanoluminescence Process." Adv. Mater. 27, 2324-2331 (2015). https://doi.org/10.1002/adma.201405826
  18. H. -H. Chou, A. Nguyen, A. Chortos, J. W. F. To, C. Lu, J. Mei, T. Kurosawa, W. -G. Bae, J. B. -H. Tok, Z. Bao, "A chameleon-inspired stretchable electronic skin with interactive colour changing controlled by tactile sensing." Nat. Commun. 6, 8011 (2015). https://doi.org/10.1038/ncomms9011
  19. G. Kim, S. Cho, K. Chang, W. S. Kim, H. Kang, S.-P. Ryu, J. Myoung, J. Park, C. Park, W. Shim, "Spatially Pressure-Mapped Thermochromic Interactive Sensor." Adv. Mater. 29, 1606120 (2017). https://doi.org/10.1002/adma.201606120
  20. H. Park, D. S. Kim, S. Y. Hong, C. Kim, J. Y. Yun, S. Y. Oh, S. W. Jin, Y. R. Jeong, G. T. Kim, J. S. Ha, "Skin-Integrated Transparent and Stretchable Strain Sensor with Interactive Color-Changing Electrochromic Display." Nanoscale, DOI: 10.1039/C7NR02147J (2017).