반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

스핀 스프레이법으로 PC 기판에 제작한 산화아연 박막의 특성

Property of Spin-sprayed ZnO Film on PC Substrate

  • 홍정수 (가천대학교 전기공학과) ;
  • ;
  • ;
  • 박용서 (가천대학교 전기공학과) ;
  • 김경환 (가천대학교 전기공학과)
  • Hoong, Jeongsoo (Department of Electrical Engineering, Gachon University) ;
  • Matsushita, Nobuhiro (Department of Materials Science and Engineering, Tokyo Institute of Technology) ;
  • Katsumata, Ken-ichi (Photocatalysis International Research Center, Tokyo University of Science) ;
  • Park, Yongseo (Department of Electrical Engineering, Gachon University) ;
  • Kim, Kyunghwan (Department of Electrical Engineering, Gachon University)
  • 투고 : 2018.08.08
  • 심사 : 2018.09.19
  • 발행 : 2018.09.30
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초록

In this study, ZnO film was deposited on polycarbonate substrate by spin-spray method at low substrate temperature of $85^{\circ}C$. Surface morphology of ZnO films was changed by adding citrate from rod to dense structure. As-deposited ZnO film indicated high transmittance above 80%. In case of the resistivity, as-deposited ZnO film had high resistivity due to the existence of organic substance in the film. However, organic substance was removed and resistivity was decreased to $3.9{\times}10^{-2}{\Omega}{\cdot}cm$, after UV irradiation.

키워드

참고문헌

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