The Journal of the Acoustical Society of Korea (한국음향학회지)

The Acoustical Society of Korea (한국음향학회)
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Investigation on lamb wave propagation in silicon wafer using large aperture line-focused transducer

대구경 선집속 탐촉자를 이용한 실리콘 웨이퍼에서의 램파 전파 특성 분석

  • 정윤재 (KAIST 부설 한국과학영재학교 응용음향학 연구실) ;
  • 양승수 (KAIST 부설 한국과학영재학교 응용음향학 연구실) ;
  • 유민재 (KAIST 부설 한국과학영재학교 응용음향학 연구실) ;
  • 김영환 (KAIST 부설 한국과학영재학교 응용음향학 연구실)
  • Received : 2018.03.22
  • Accepted : 2018.07.19
  • Published : 2018.07.31
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Abstract

In this study, the propagation characteristics of Lamb waves in anisotropic silicon wafers of (100) and (111) direction were investigated by PVDF (Polyvinylidene Fluoride) line-focused transducer. The modified V(f,z) method was used because the Lamb waves are dispersive. For confirming the anisotropy, a line-focused transducer was used and the silicon wafer was rotated 180 degrees at intervals of 1 degree. As a result, $A_0$ and $S_0$ modes were observed. The speed of $S_0$ mode according to propagation direction showed anisotropy which is associated with the crystal structure, and the speed of $A_0$ mode was isotropic. The result is consistent with the crystal structure of silicon and the mechanism of vibration of each Lamb wave modes.

본 연구에서는 이방성 매질인 (100), (111) 방향의 실리콘 웨이퍼에서 램파의 전파 특성을 PVDF-(Polyvinylidene Fluoride) 선집속 탐촉자를 이용하여 분석하였다. 램파가 분산성을 가지기 때문에 탐촉자와 시편 사이의 거리 z를 바꿔가며 측정하는 V(f,z)방법을 변형하여 사용하였다. 또한 이방성을 확인하기 위해 선집속 탐촉자가 사용되었고, 실리콘 웨이퍼를 $1^{\circ}$ 간격으로 $180^{\circ}$ 회전시켜 측정하였다. 실험 결과, $A_0$ 모드와 $S_0$ 모드를 확인할 수 있었다. $S_0$ 모드의 속력 분포에서 각 결정 방향의 구조와 연관된 이방성을 확인할 수 있었고, $A_0$ 모드의 속력은 등방성으로 나타났다. 이는 실리콘의 결정구조와 램파의 각 모드의 진동양상과 부합하는 결과이다.

Keywords

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