검사 및 측정 장비 진동제어를 위한 능동댐퍼 설계

Design of an Active Damper for Suppressing Vibrations of Inspection and Measurement Devices

  • 노호철 (금오공과대학교 대학원) ;
  • 노승훈 (금오공과대학교 기계시스템공학과) ;
  • 류영찬 ((주)에이스이노테크) ;
  • 이일환 ((주)티브이에스) ;
  • 정금섭 (폴리텍대학 구미캠퍼스 스마트전자과) ;
  • 김영조 (구미대학교 기계공학과)
  • 투고 : 2019.01.25
  • 심사 : 2019.03.17
  • 발행 : 2019.03.31

초록

Inspection and measurement of surface quality is one of the most critical processes for manufacturing products such as semiconductor wafers, sapphire substrates, and display panels. The vibrations of the inspection and measurement devices are supposed to be the most dominant factors for severe measurement errors and longer measuring time. In this study, dynamic characteristics of an inspection and measurement device are analyzed through frequency response experiment and computer simulation to obtain parameters such as frequencies, magnitudes, mode shapes, and periods of vibrations. And then an active damper which consists of sensor, interface board, and actuator is designed based on the parameters to formulate the most effective reaction signal to suppress the vibrations which is generated by an interface board, and provided by an actuator. If the vibrations are measured by the sensor, the active damper immediately generates and provides the corresponding reaction signal to inspection and measurement device. The result shows that the active damper can suppress structural vibrations effectively and reduce measuring time of the device and enhance the productivity.

키워드

참고문헌

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