Ceramist (세라미스트)

The Korean Ceramic Society (한국세라믹학회)
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Review of Electrical Characterization of Ceramic Thin Films for the Next Generation Semiconductor Devices

차세대 반도체 소자용 세라믹 박막의 전기적 분석 방법 리뷰

  • Lee, Donghyun (School of Materials Science and Engineering, Pusan National University) ;
  • Yang, Kun (School of Materials Science and Engineering, Pusan National University) ;
  • Park, Ju-Yong (School of Materials Science and Engineering, Pusan National University) ;
  • Park, Min Hyuk (School of Materials Science and Engineering, Pusan National University)
  • 이동현 (부산대학교 재료공학부) ;
  • 양건 (부산대학교 재료공학부) ;
  • 박주용 (부산대학교 재료공학부) ;
  • 박민혁 (부산대학교 재료공학부)
  • Received : 2019.12.07
  • Accepted : 2019.12.16
  • Published : 2019.12.31
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Abstract

Ceramic thin films are key materials for fundamental electronic devices such as transistors and capacitors which are highly important for the state-of-the-art electronic products. Their characteristic dielectric properties enable accurate control of current conduction through channel of transistors and stored charges in capacitor electrodes. The electronic conduction in ceramic thin films is one of the most important part to understand the electrical properties of electronic device based on ceramic thin films. There have been numerous papers dealing with the electronic conduction mechanisms in emerging ceramic thin films for future electronic devices, but these studies have been rarely reviewed. Another interesting electrical characterization technique is one based on electrical pulses and following transient responses, which can be used to examine physical and chemical changes in ceramic thin films. In this review, studies on various conduction mechanisms through ceramic thin films and electrical characterization based on electric pulses are comprehensively reviewed.

Keywords

References

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