Ceramist (세라미스트)

The Korean Ceramic Society (한국세라믹학회)
권호 표지
DOI QR코드

DOI QR Code

Status of Quartz Glass Crucible

석영유리 도가니 국내외 현황

  • Received : 2019.09.10
  • Accepted : 2019.10.30
  • Published : 2019.12.31
Download PDF
⟨ Previous Next ⟩

Abstract

A quartz glass crucible is the essential material for manufacturing silicon ingots such as semiconductors and solar cells. Quartz glass crucibles for semiconductors and solar cells are made similar, but differ in surface purity, structure and durability. Recently, ultra high purity synthetic glass crucibles for semiconductors have become more important due to foreign problems. In Korea, it has succeeded in producing 28-inch quartz glass crucibles through the past 10 years. However, 32-inch synthetic quartz glass for the production of silicon ingots for semiconductors is not up to the level of advanced technology, and the technology gap is expected to be 2 to 3 years. In order to overcome these technological gaps and localize synthetic quartz glass ware, close cooperation between production companies and demand companies and localization of synthetic quartz glass powder must also be made. In addition, if government support can be added, faster results can be expected.

Keywords

References

  1. 김건우, 문병기, "한국반도체 산업의 경쟁력, 기회 및 위협 요인", Trade Focus 2019년 12호
  2. 중앙시사매거진, "반도체 시장 연착륙 전망", http://jmagazine.joins.com/economist/view/324524 (2019-01-14)
  3. I. Wells, Lecture note; IC Fabrication Overview Procedure of Silicon Wafer Production. 1996. 7. 16. https://slideplayer.com/slide/8532802/
  4. W. ZULEHNER, "CZOCHRALSKI, GROWTH OF SILICON", J. Crystal Growth 65 (1983) 189 https://doi.org/10.1016/0022-0248(83)90051-9
  5. Sujit Nayak, Lecture note; Crystal Growth. 2016. 6 30. https://www.slideshare.net/SujitKumarNayak1/crystal-growth-63620916
  6. K.Yamahara, X. Huang, S. Sakai, A. Utsunomiya, Y. Tsurita and K. Hoshikawa, "Surface of Silica Glass Reacting with Silicon Melt: Effect of Raw Materials for Silica Crucibles", Jpn. J. Appl. Phys. 40 (2001) 1178 https://doi.org/10.1143/JJAP.40.1178
  7. Z. Liu, and T. Carlberg, "Reactions between liquid silicon and vitreous silica", J. Mater. Res., 7(2) 352-358 (1992) https://doi.org/10.1557/JMR.1992.0352
  8. S.M. Schnurre, and R. Schmid-Fetzer, "Reactions at the liquid silicon and silica glass interface", J. Crystal Growth 250 (2003) 370 https://doi.org/10.1016/S0022-0248(02)02491-0
  9. M. Tomozawa, D. Kim, and V. Lou, "Preparation oh high purity, low water content fused silica glass", J Non-Crystal. Sol. 296 (2001) 102 https://doi.org/10.1016/S0022-3093(01)00877-8
  10. X. Huang, S. Koh, and K. Wu, M. Chen, T. Hoshikawa, K. Hoshikawa, and S. Uda, "Reaction at the interface between Si melt and a Ba-doped silica crucible", J. Crystal Growth, 277, (2005), 154 https://doi.org/10.1016/j.jcrysgro.2005.01.101
  11. GIR, "Global Quartz Crucible Market 2019 by Manufacturers, Regions, Type and Application, Forecast to 2024" 2019. 4
  12. 무역협회 국내 수출입현황 자료 분석 (HS 7020001012, 반도체웨이퍼 제조에 사용되는 노용의 석영도가니)
  13. 한국신용평가, SK실트론(주), 2018.02.07