Applied Microscopy

  • Volume 50
  • /
  • Pages.2.1-2.7
  • /
  • 2020
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  • 2287-5123(pISSN)
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  • 2287-4445(eISSN)
Korean Society of Microscopy (한국현미경학회)
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Introduction to the standard reference data of electron energy loss spectra and their database: eel.geri.re.kr

  • Jeong Eun Chae (Test Analysis Research Center, Innovative Technology Research Division, Gumi Electronics & Information Technology Research Institute) ;
  • Ji-Soo Kim (Test Analysis Research Center, Innovative Technology Research Division, Gumi Electronics & Information Technology Research Institute) ;
  • Sang-Yeol Nam (Test Analysis Research Center, Innovative Technology Research Division, Gumi Electronics & Information Technology Research Institute) ;
  • Min Su Kim (Test Analysis Research Center, Innovative Technology Research Division, Gumi Electronics & Information Technology Research Institute) ;
  • Jucheol Park (Test Analysis Research Center, Innovative Technology Research Division, Gumi Electronics & Information Technology Research Institute)
  • Received : 2019.09.04
  • Accepted : 2019.10.25
  • Published : 2020.12.31
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Abstract

Electron energy loss spectroscopy (EELS) is an analytical technique that can provide the structural, physical and chemical information of materials. The EELS spectra can be obtained by combining with TEM at sub-nanometer spatial resolution. However, EELS spectral information can't be obtained easily because in order to interpret EELS spectra, we need to refer to and/or compare many reference data with each other. And in addition to that, we should consider the different experimental variables used to produce each data. Therefore, reliable and easily interpretable EELS standard reference data are needed. Our Electron Energy Loss Data Center (EELDC) has been designated as National Standard Electron Energy Loss Data Center No. 34 to develop EELS standard reference (SR) data and to play a role in dissemination and diffusion of the SR data to users. EELDC has developed and collected EEL SR data for the materials required by major industries and has a total of 82 EEL SR data. Also, we have created an online platform that provides a one-stop-place to help users interpret quickly EELS spectra and get various spectral information. In this paper, we introduce EEL SR data, the homepage of EELDC and how to use them.

Keywords

Acknowledgement

This research was supported by the MOTIE (Ministry of Trade, Industry & Energy (project number 10080654) and KSRC (Korea Semiconductor Research Consortium) support program for the development of the future semiconductor device.

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