반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

반도체 장비용 직교 로봇의 스틸 밴드 마모 문제 해결에 관한 연구

A Study on Wear Problem of Cartesian Robot for Semiconductor Equipment

  • 김종균 (한국기술교육대학교대학원 메카트로닉스공학과) ;
  • 이송연 (한국기술교육대학교대학원 메카트로닉스공학과) ;
  • 허용정 (한국기술교육대학교 메카트로닉스공학부)
  • Kim, Jong Gyun (Mechatronics Engineering, Graduate School of Korea University of Technology and Education) ;
  • Lee, Song Yeon (Mechatronics Engineering, Graduate School of Korea University of Technology and Education) ;
  • Huh, Yong Jeong (School of Mechatronics Engineering, Korea University of Technology and Education)
  • 투고 : 2021.09.07
  • 심사 : 2021.09.16
  • 발행 : 2021.09.30
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초록

Cartesian robot is used in semiconductor manufacturing. Friction between steel band and mover wears the steel band. The emission of wear particle from steel band contaminates semiconductor equipment. At the manufacturing site, the steel band is replaced periodically to minimize the generation of wear particle. But this is not a good way to minimize the generation of wear particle, because it is hard to specify the moment of replacement. We suggested the methodology to minimize the generation of wear particle using TRIZ technique. Also we made prototype robot which the solution is applied, and the performance of the solution was verified through experiments. As a result of verification, it was confirmed that the solution significantly reduced the generation of wear particle compared to the standard way.

키워드

참고문헌

  1. Chae Hun An, Jeong Hee Choi, Joon Soon Park and Min Su Park, "A Review of Experimental Evaluation Method to Floor Environment Vibration Criteria for Semiconductor and Display Equipment," J. of The Korean Society of Semiconductor & Display Technology, Vol. 20, No.1 pp. 25-31, 2021.
  2. Song-Yeon Lee, Yong Jeong Huh and Jong Soon Park, "A Study on Warpage Reduction of FDM 3D Printer Output Using TRIZ Method," J. of The Korean Society of Semiconductor & Display Technology, Vol. 15, No.2 pp. 1-5, 2016.
  3. Song-Yeon Lee and Yong Jeong Huh, "A Study on Manufacturing Condition of PLGA Scaffold Using 3SC Practical TRIZ and Design of Experiments," J. of The Korean Society of Semiconductor & Display Technology, Vol. 17, No.4 pp. 70-75, 2018.
  4. Song-Yeon Lee and Yong Jeong Huh, "A Study on Problem Solving of 3D Printing Production of Scaffold Using ADRIGE TRIZ Algorithm and DOE," J. of The Korean Society of Semiconductor & Display Technology, Vol. 18, No.2 pp. 92-97, 2019.
  5. Jong Hyeong Kim, Hyung-jik Kim, Jae Nam Jung, Dong-hee Jang and Hyuk-dong Kwon, "Portable-size Drone Design Using TRIZ Method," J. of the Korean Society for Manufacturing Technology Engineers Vol. 26, No. 2, pp. 230-237, 2017. https://doi.org/10.7735/ksmte.2017.26.2.230
  6. Sa Hwan Leem , Seong Do Hong and Yong Jeong Huh, "A Study on the Creative Design of Solar Flower using TRIZ(6SC)," J. of The Korean Society of Semiconductor & Display Technology, Vol. 10, No.2 pp. 19-23, 2019.