반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

Interpretation of the Asymmetric Color and Shape of Brownish Ring in Quartz Crucible

  • Jung, YoonSung (Division of Materials Science and Engineering Hanyang University) ;
  • Choi, Jae Ho (Division of Materials Science and Engineering Hanyang University) ;
  • Min, Kyung Won (Division of Materials Science and Engineering Hanyang University) ;
  • Byun, Young Min (Division of Materials Science and Engineering Hanyang University) ;
  • Im, Won Bin (Division of Materials Science and Engineering Hanyang University) ;
  • Kim, Hyeong-Jun (Engineering Materials Center, Korea Institute of Ceramic Engineering and Technology)
  • 투고 : 2022.11.09
  • 심사 : 2022.12.12
  • 발행 : 2022.12.31
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초록

Brownish rings (BRs) with white interiors are formed during the manufacture of silicon ingots in quartz glass crucibles. These BRs inhibit the yield of silicon ingots. However, the composition and mechanism of the formation of these BRs remain unclear thus far. Therefore, in this study, we analyzed the color and shape of these BRs. Raman analysis revealed that the brown and white colors appear owing to oxygen deficiency rather than crystallization from excess oxygen supply as previously assumed. Moreover, the dark shade of the brown areas depends on the degree of oxygen deficiency and the asymmetrical width of the brown areas is attributed to the direction of the molten silicon flow, which is influenced by the rotation and heat of the ingot crucible.

키워드

과제정보

This study was funded by the South Korean Ministry of Trade, Industry and Energy, and the Materials Technology Development Project (detailed project ID 20012959).

참고문헌

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