Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Design of Non-flammable Mixed Refrigerant Joule-Thomson Refrigerator for Semiconductor Etching Process

반도체 식각공정을 위한 비가연성 혼합냉매 줄톰슨 냉동기 설계

  • Lee, Cheonkyu (Carbon Neutral Technology R&D Department, Research Institute of Clean Manufacturing System, Korea Institute of Industrial Technology (KITECH)) ;
  • Kim, Jin Man (Carbon Neutral Technology R&D Department, Research Institute of Clean Manufacturing System, Korea Institute of Industrial Technology (KITECH)) ;
  • Lee, Jung-Gil (Carbon Neutral Technology R&D Department, Research Institute of Clean Manufacturing System, Korea Institute of Industrial Technology (KITECH))
  • 이천규 (한국생산기술연구원 청정기술연구소 탄소중립산업기술연구부문) ;
  • 김진만 (한국생산기술연구원 청정기술연구소 탄소중립산업기술연구부문) ;
  • 이정길 (한국생산기술연구원 청정기술연구소 탄소중립산업기술연구부문)
  • Received : 2022.06.16
  • Accepted : 2022.06.23
  • Published : 2022.06.30
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Abstract

A cryogenic Mixed Refrigerant Joule-Thomson refrigeration cycle was designed to be applied to the semiconductor etching process with non-flammable constituents. 3-stage cascade refrigerator, single mixed refrigerant Joule-Thomson refrigerator, and 2-stage cascade type mixed refrigerant Joule-Thomson refrigerator are analyzed to figure out the coefficient of performance. Non-flammable mixture of argon(Ar), tetrafluoromethane(R14), trifluoromethane (R23) and octafluoropropane(R218) were utilized to analyze the refrigeration cycle efficiency. The designed refrigeration cycle was adapted to cool down the coolant of HFE7200(Ethoxy-nonafluorobutane, C4F9OC2H5) with certain constraints. Maximum coefficient of performance of the refrigeration system is obtained as 0.289 for the cooling temperature lower than -100℃. The detailed result of the coefficient of performance according to the mixture composition is discussed in this study.

Keywords

Acknowledgement

본 연구는 2021년도 산업통상자원부 기계·장비산업기술개발사업 "냉각용량 2 kW급 반도체 식각 공정(Etching Process)용 초저온 냉각 시스템 개발"의 연구비 지원에 의한 연구임 (No. 20014817).

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