A Study on the Thermal Properties and Plasma Resistance of Bi2O3-Al2O3-SiO2 Glass

Bi2O3-Al2O3-SiO2 유리의 열물성과 내플라즈마 특성 연구

  • Young Min Byun (Engineering Materials Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Jae Ho Choi (Engineering Materials Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Won Bin Im (Division of Materials Science and Engineering Hanyang University) ;
  • Hyeong Jun Kim (Engineering Materials Center, Korea Institute of Ceramic Engineering and Technology)
  • Received : 2023.03.03
  • Accepted : 2023.03.22
  • Published : 2023.03.31

Abstract

In this study, we investigated the effects of BiAlSiO glass composition on its glass forming range, thermal properties, and plasma resistance. The results showed that increasing the Al2O3 content suppressed the tendency for crystallization and hindered glass formation beyond a certain threshold. Bi2O3 was found to increase the content of non-bridging oxygen, resulting in a decrease in glass transition temperature and an increase in thermal expansion coefficient. Furthermore, the etching rate was found to improve with increasing Al2O3 content but decrease with increasing SiO2 content. It was concluded that the boiling point of fluorinated compounds should be considered to 900℃. Therefore, this study is expected to contribute to the understanding of the properties of BiAlSiO glass and its application to low temperature melting PRG compositions.

Keywords

Acknowledgement

이 논문은 한국연구재단 (NRF)[NRF-2020M3H4 A3106001]으로부터 지원을 받아 연구되었습니다.

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